Rotation stage design used for production of rotation symetric structures for laseres had to fulfil condition of small shimmy less the 2 micrometers.
Rotation stage design used for production of rotation symetric structures for laseres had to fulfil condition of small shimmy less the 2 micrometers. (en)
Konstrukce stolku pro vyrobu rotacne symetrickych struktur slouzicich k uprave energetickeho profiu laseroveho svazku. Musi splnovat pozadavky na nizkou hazivost vzhledem k hloubce ostrosti objektivu litografu (cca +- 2 mikrometry). (cs)