About: Influence of Thickness Bilayer Period and Substráte Bias on Microhardness of Multilayer System TiN/TaN     Goto   Sponge   NotDistinct   Permalink

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Description
  • Studie byla zaměřena na vlastnosti vícevrstvého systému TiN/TaN vytvořeného na různých substrátech magnetronovým napařováním.Tloušťka periody vrstvy se pohybovala od 11 do 390 nm při úrovni předpětí na substrátu 0 a -100V.Mechanické a trigologické vlastnosti systému byly hodnoceny v závislosti na tloušťce periody. (cs)
  • Experiment was aimed on microhardness of multilayer coatings on TiN/TaN basis applied on selected substrates of variable bias value,by means of reactive magnetron sputtering in relation to the variation of thickness period( 11 - 390 nm) and substrate bias U (0,-100V).Further on,fundamentals mechanic,tribologic characteristics were observed in dependence on thickness period.
  • Experiment was aimed on microhardness of multilayer coatings on TiN/TaN basis applied on selected substrates of variable bias value,by means of reactive magnetron sputtering in relation to the variation of thickness period( 11 - 390 nm) and substrate bias U (0,-100V).Further on,fundamentals mechanic,tribologic characteristics were observed in dependence on thickness period. (en)
Title
  • Vliv tloušťky periody a předpětí substrátu na mikrotvrdost systému TiN/TaN (cs)
  • Influence of Thickness Bilayer Period and Substráte Bias on Microhardness of Multilayer System TiN/TaN
  • Influence of Thickness Bilayer Period and Substráte Bias on Microhardness of Multilayer System TiN/TaN (en)
skos:prefLabel
  • Vliv tloušťky periody a předpětí substrátu na mikrotvrdost systému TiN/TaN (cs)
  • Influence of Thickness Bilayer Period and Substráte Bias on Microhardness of Multilayer System TiN/TaN
  • Influence of Thickness Bilayer Period and Substráte Bias on Microhardness of Multilayer System TiN/TaN (en)
skos:notation
  • RIV/68407700:21220/04:02141065!RIV09-MSM-21220___
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(MSM 212200008)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 568065
http://linked.open...ai/riv/idVysledku
  • RIV/68407700:21220/04:02141065
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • Coatings; Multilayer system; TaN; TiN (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [FD2437DE2B8E]
http://linked.open...v/mistoKonaniAkce
  • Praha
http://linked.open...i/riv/mistoVydani
  • Praha
http://linked.open...i/riv/nazevZdroje
  • Workshop 2004
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Cejp, Jiří
  • Miřejovský, Jiří
  • Holdová, M.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • České vysoké učení technické v Praze
https://schema.org/isbn
  • 80-01-02945-X
http://localhost/t...ganizacniJednotka
  • 21220
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