About: Strain sensing on steel surfaces using vacuum packaged MEMS resonators

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://elsevier.com/locate/procedia
Description	The paper presents a technology for strain sensing on steel using resonant MEMS packaged in vacuum. For this purpose, a custom sensor fabrication technology and a novel vacuum packaging technique have been developed. The MEMS sensors have been fabricated by surface micromachining of thick (15 um) Silicon On Insulator substrates with heavily doped handle layers (= 0.005 cm). Using this process, Double-Ended Tuning Fork (DETF) parallel-plate resonators with reduced coupling gaps (less than 1 um) have been fabricated, using a high-performance Deep Reactive Ion Etching performed on submicrometric submicrometer features realized by near-UV lithography combined with a maskless line narrowing technique. The devices have been bonded to a thin steel bar by epoxy glue, packaged in vacuum and tested by applying strain to the bar, showing good tolerances to packaging parasitics, measurement reversibility, and strain sensitivity of 10 Hz/uε. The paper presents a technology for strain sensing on steel using resonant MEMS packaged in vacuum. For this purpose, a custom sensor fabrication technology and a novel vacuum packaging technique have been developed. The MEMS sensors have been fabricated by surface micromachining of thick (15 um) Silicon On Insulator substrates with heavily doped handle layers (= 0.005 cm). Using this process, Double-Ended Tuning Fork (DETF) parallel-plate resonators with reduced coupling gaps (less than 1 um) have been fabricated, using a high-performance Deep Reactive Ion Etching performed on submicrometric submicrometer features realized by near-UV lithography combined with a maskless line narrowing technique. The devices have been bonded to a thin steel bar by epoxy glue, packaged in vacuum and tested by applying strain to the bar, showing good tolerances to packaging parasitics, measurement reversibility, and strain sensitivity of 10 Hz/uε. (en)
Title	Strain sensing on steel surfaces using vacuum packaged MEMS resonators Strain sensing on steel surfaces using vacuum packaged MEMS resonators (en)
skos:prefLabel	Strain sensing on steel surfaces using vacuum packaged MEMS resonators Strain sensing on steel surfaces using vacuum packaged MEMS resonators (en)
skos:notation	RIV/68407700:21110/10:00190393!RIV12-GA0-21110___
http://linked.open...avai/riv/aktivita	P
http://linked.open...avai/riv/aktivity	P(GA103/09/1600)
http://linked.open...iv/cisloPeriodika	5
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Záleský, Jan
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	České vysoké učení technické v Praze / Fakulta stavební
http://linked.open...dnocenehoVysledku	290203
http://linked.open...ai/riv/idVysledku	RIV/68407700:21110/10:00190393
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	strain sensing; steel; MEMS resonators; vacuum packaging; monitoring (en)
http://linked.open.../riv/klicoveSlovo	vacuum packaging monitoring steel MEMS resonators strain sensing
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[F2F0BFBB78A8]
http://linked.open...i/riv/nazevZdroje	Procedia Engineering
http://linked.open...in/vavai/riv/obor	JM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...vavai/riv/projekt	Research of the monitoring methods of micro-deformations of underground (metro) structures
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	5
http://linked.open...iv/tvurceVysledku	Záleský, Jan Belsito, L. Ferri, M. Mancarella, F. Roncaglia, A. Seshia, A. A. Soga, K. Yan, J.
http://linked.open...ain/vavai/riv/wos	000287162400351
issn	1877-7058
number of pages	4 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.proeng.2010.09.383
http://localhost/t...ganizacniJednotka	21110
is http://linked.open...avai/riv/vysledek of	Strain sensing on steel surfaces using vacuum packaged MEMS resonators Strain sensing on steel surfaces using vacuum packaged MEMS resonators

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