About: Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We have investigated the effect of irradiation of solid Sn targets with laser pulses of sub-ns duration and sub-mJ energy on the diameter of the extreme ultraviolet (EUV) emitting region and source conversion efficiency. It was found that an in-band EUV source diameter as low as 18 lm was produced due to the short scale length of a plasma produced by a sub-ns laser. Most of the EUV emission occurs in a narrow region with a plasma density close to the critical density value. Such EUV sources are suitable for high brightness and high repetition rate metrology applications. We have investigated the effect of irradiation of solid Sn targets with laser pulses of sub-ns duration and sub-mJ energy on the diameter of the extreme ultraviolet (EUV) emitting region and source conversion efficiency. It was found that an in-band EUV source diameter as low as 18 lm was produced due to the short scale length of a plasma produced by a sub-ns laser. Most of the EUV emission occurs in a narrow region with a plasma density close to the critical density value. Such EUV sources are suitable for high brightness and high repetition rate metrology applications. (en)
Title	Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source (en)
skos:prefLabel	Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source Evolution of laser-produced Sn extreme ultraviolet source diameter for high-brightness source (en)
skos:notation	RIV/68378271:_____/14:00441167!RIV15-AV0-68378271
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(ED2.1.00/01.0027), P(EE2.3.20.0143), P(EE2.3.30.0057)
http://linked.open...iv/cisloPeriodika	7
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Mocek, Tomáš Roy, Amitava Endo, Akira Miura, Taisuke
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	15573
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/14:00441167
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	laser-produced plasma; dynamics; EUV source; ultraviolet source; targets (en)
http://linked.open.../riv/klicoveSlovo	targets dynamics laser-produced plasma EUV source ultraviolet source
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[F1A7166DC1AD]
http://linked.open...i/riv/nazevZdroje	Applied Physics Letters
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	12 (xsd:int)
http://linked.open...vavai/riv/projekt	RESEARCH AND DEVELOPMENT OF NEW GENERATION OF HIGH ENERGY, DIODE PUMPED LASERS FOR APPLICATIONS HiLASE: New lasers for industry and research Strengthening capacity of research teams in the field of physical sciences
http://linked.open...UplatneniVysledku	2014
http://linked.open...v/svazekPeriodika	105
http://linked.open...iv/tvurceVysledku	Mocek, Tomáš Roy, Amitava Hara, H. Li, B. Sunahara, A. Endo, Akira Dunne, P. Higashiguchi, T. Ohashi, H. Miura, Taisuke Arai, G. O´Sullivan, G.
http://linked.open...ain/vavai/riv/wos	000341189800113
issn	0003-6951
number of pages	4 (xsd:int)
http://bibframe.org/vocab/doi	10.1063/1.4893611

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software