About: Mask-free surface structuring of micro- and nanocrystalline diamond films by reactive ion plasma etching

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About: Mask-free surface structuring of micro- and nanocrystalline diamond films by reactive ion plasma etching Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this technologically oriented study, the mask-free surface structuring of micro- and nanocrystalline diamond thin films is presented. The structuring of diamond films was performed by the reactive ion plasma etching in capacitively coupled radiofrequency plasma using different plasma chemistries (i.e. gas mixtures: O2, CF4, SF6 and Ar). We found that employing only oxygen plasma results in the formation of diamond nanowhiskers. Adding a small amount of CF4 makes the surface flatter. Argon containing gas mixture leads to smooth diamond surface without any whiskers. The etching mechanism is discussed with respect to the primary diamond morphology (micro- vs. nano-crystalline) and the used gas mixture. In this technologically oriented study, the mask-free surface structuring of micro- and nanocrystalline diamond thin films is presented. The structuring of diamond films was performed by the reactive ion plasma etching in capacitively coupled radiofrequency plasma using different plasma chemistries (i.e. gas mixtures: O2, CF4, SF6 and Ar). We found that employing only oxygen plasma results in the formation of diamond nanowhiskers. Adding a small amount of CF4 makes the surface flatter. Argon containing gas mixture leads to smooth diamond surface without any whiskers. The etching mechanism is discussed with respect to the primary diamond morphology (micro- vs. nano-crystalline) and the used gas mixture. (en)
Title	Mask-free surface structuring of micro- and nanocrystalline diamond films by reactive ion plasma etching Mask-free surface structuring of micro- and nanocrystalline diamond films by reactive ion plasma etching (en)
skos:prefLabel	Mask-free surface structuring of micro- and nanocrystalline diamond films by reactive ion plasma etching Mask-free surface structuring of micro- and nanocrystalline diamond films by reactive ion plasma etching (en)
skos:notation	RIV/68378271:_____/14:00432632!RIV15-GA0-68378271
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(FR-TI2/736), P(GAP108/12/0910), P(GAP108/12/0996)
http://linked.open...iv/cisloPeriodika	7
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Domonkos, Mária Kromka, Alexander Hruška, Karel Varga, Marián Babchenko, Oleg Ižák, Tibor
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	27496
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/14:00432632
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	micro- and nanocrystalline diamond; capacitively coupled plasma; reactive ion etching; nanostructuring; scanning electron microscopy (en)
http://linked.open.../riv/klicoveSlovo	nanostructuring reactive ion etching scanning electron microscopy capacitively coupled plasma micro- and nanocrystalline diamond
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[4D86A5CD1CBD]
http://linked.open...i/riv/nazevZdroje	Advanced Science, Engineering and Medicine
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Fabrication, structuring and treatment of nanocrystalline diamonds for antibacterial studies *Modular scanning electron microscope Bio-inspired Scaffolds as Active Sensor Systems
http://linked.open...UplatneniVysledku	2014
http://linked.open...v/svazekPeriodika	6
http://linked.open...iv/tvurceVysledku	Babchenko, Oleg Hruška, Karel Kromka, Alexander Ižák, Tibor Varga, Marián Domonkos, Mária
issn	2164-6627
number of pages	5 (xsd:int)
http://bibframe.org/vocab/doi	10.1166/asem.2014.1573

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