About: Structural and electrical characterization of diamond ﬁlms deposited in nitrogen/oxygen containing gas mixture by linear antenna microwave CVD process

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About: Structural and electrical characterization of diamond ﬁlms deposited in nitrogen/oxygen containing gas mixture by linear antenna microwave CVD process Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this paper we demonstrate the large area deposition of n-type conductive nanocrystalline diamond thin films on p-type Si substrates. We show that adding N2 into CH4/H2/CO2 gas mixture allows a wide controlling of diamond film morphology from micro- to nanocrystalline, blockstone-like or porous-like morphology potentially suitable for various applications. Moreover, after adding we found that the diamond films revealed a deep level with activation energy of 0.440.03 eV. In this paper we demonstrate the large area deposition of n-type conductive nanocrystalline diamond thin films on p-type Si substrates. We show that adding N2 into CH4/H2/CO2 gas mixture allows a wide controlling of diamond film morphology from micro- to nanocrystalline, blockstone-like or porous-like morphology potentially suitable for various applications. Moreover, after adding we found that the diamond films revealed a deep level with activation energy of 0.440.03 eV. (en)
Title	Structural and electrical characterization of diamond ﬁlms deposited in nitrogen/oxygen containing gas mixture by linear antenna microwave CVD process Structural and electrical characterization of diamond ﬁlms deposited in nitrogen/oxygen containing gas mixture by linear antenna microwave CVD process (en)
skos:prefLabel	Structural and electrical characterization of diamond ﬁlms deposited in nitrogen/oxygen containing gas mixture by linear antenna microwave CVD process Structural and electrical characterization of diamond ﬁlms deposited in nitrogen/oxygen containing gas mixture by linear antenna microwave CVD process (en)
skos:notation	RIV/68378271:_____/14:00432440!RIV15-GA0-68378271
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(GBP108/12/G108)
http://linked.open...iv/cisloPeriodika	SEP
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Kromka, Alexander Varga, Marián Vojs, Marian Babchenko, Oleg Ižák, Tibor
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	47815
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/14:00432440
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	pulsed linear antenna microwave chemical vapor deposition; nanocrystalline diamond; Raman spectroscopy; admittance spectroscopy; n-type conductive NCD (en)
http://linked.open.../riv/klicoveSlovo	Raman spectroscopy admittance spectroscopy n-type conductive NCD pulsed linear antenna microwave chemical vapor deposition nanocrystalline diamond
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[E70DF9681C1F]
http://linked.open...i/riv/nazevZdroje	Applied Surface Science
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Preparation, modification and characterization of materials by radiation
http://linked.open...UplatneniVysledku	2014
http://linked.open...v/svazekPeriodika	312
http://linked.open...iv/tvurceVysledku	Babchenko, Oleg Kromka, Alexander Ižák, Tibor Mikolášek, M. Marton, M. Varga, Marián Vojs, Marian
http://linked.open...ain/vavai/riv/wos	000339998700042
issn	0169-4332
number of pages	5 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.apsusc.2014.05.176

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