About: Experimental study of the discharge in the low pressure plasma jet sputtering system

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Experimental study of the discharge in the low pressure plasma jet sputtering system Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	This article reports on experimental study of the discharge in the low pressure plasma jet sputtering system operated in the continuous DC regime of the discharge excitation. Presented measurements were focused on the description of the working pressure impact on the basic discharge characteristics. The pressure dependence of the gas flow velocity from the nozzle was examined by means of Pitot tube. Further an approximate measurement of the discharge current spatial distribution was realized as well. The second half of the article presents results from Langmuir probe measurements under the conditions of low pressures in the range of units of pascals. These conditions are of special importance in some particular applications especially in preparation of thin layers with high crystallinity. Used experimental setup enabled to perform Langmuir probe diagnostic with spatial resolution both in the plasma jet axis direction and in the direction perpendicular to it. This article reports on experimental study of the discharge in the low pressure plasma jet sputtering system operated in the continuous DC regime of the discharge excitation. Presented measurements were focused on the description of the working pressure impact on the basic discharge characteristics. The pressure dependence of the gas flow velocity from the nozzle was examined by means of Pitot tube. Further an approximate measurement of the discharge current spatial distribution was realized as well. The second half of the article presents results from Langmuir probe measurements under the conditions of low pressures in the range of units of pascals. These conditions are of special importance in some particular applications especially in preparation of thin layers with high crystallinity. Used experimental setup enabled to perform Langmuir probe diagnostic with spatial resolution both in the plasma jet axis direction and in the direction perpendicular to it. (en)
Title	Experimental study of the discharge in the low pressure plasma jet sputtering system Experimental study of the discharge in the low pressure plasma jet sputtering system (en)
skos:prefLabel	Experimental study of the discharge in the low pressure plasma jet sputtering system Experimental study of the discharge in the low pressure plasma jet sputtering system (en)
skos:notation	RIV/68378271:_____/13:00437315!RIV15-AV0-68378271
http://linked.open...avai/riv/aktivita	I P S Z
http://linked.open...avai/riv/aktivity	I, P(GA202/07/0044), P(GA202/09/0800), P(GAP205/11/0386), P(GD202/08/H057), S, Z(MSM0021620834)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2015
http://linked.open...aciTvurceVysledku	Hubička, Zdeněk
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	74115
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/13:00437315
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	hollow cathode; plasma jet sputtering system; Langmuir probe (en)
http://linked.open.../riv/klicoveSlovo	Langmuir probe plasma jet sputtering system hollow cathode
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[7BF294363E0D]
http://linked.open...i/riv/nazevZdroje	Contributions to Plasma Physics
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	1 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced experimental research of discharge plasma sources applied for deposition of nanostructured thin films Nonlinear Effects Near Antennas in Tokamaks Modern trends in plasma physics Pulse mode and microwave plasma sources - research and applications
http://linked.open...UplatneniVysledku	2013
http://linked.open...v/svazekPeriodika	53
http://linked.open...iv/tvurceVysledku	Hubička, Zdeněk Tichý, M. Kudrna, P. Klusoň, J. Kolpaková, A. Picková, I.
http://linked.open...ain/vavai/riv/wos	000313491700005
http://linked.open...n/vavai/riv/zamer	Condensed Matter Physics – New Materials and Technologies
issn	0863-1042
number of pages	6 (xsd:int)
http://bibframe.org/vocab/doi	10.1002/ctpp.201310002

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 47 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software