About: Controlled structuring of self–assembled polystyrene microsphere arrays by two different plasma systems

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About: Controlled structuring of self–assembled polystyrene microsphere arrays by two different plasma systems Goto Sponge NotDistinct Permalink

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this study we present a successful manipulation of microspheres by reactive ion etching (RIE). A self-assembled monolayer close-packed array of monodisperse polystyrene microspheres (PM) with diameter of 471 nm was used as the primary template. The PM templates were processed in two different RIE systems: (i) capacitively coupled radiofrequency plasma (CCP) and (ii) dual plasma system which combines CCP and pulsed linear-antenna microwave plasma (PLAMWP). The influence of process conditions on the PM geometry was systematically studied by scanning electron microscopy (SEM). The process conditions were controlled by varying radiofrequency (RF) power, gas mixture (O2:CF4 ratio) and process duration. In this study we present a successful manipulation of microspheres by reactive ion etching (RIE). A self-assembled monolayer close-packed array of monodisperse polystyrene microspheres (PM) with diameter of 471 nm was used as the primary template. The PM templates were processed in two different RIE systems: (i) capacitively coupled radiofrequency plasma (CCP) and (ii) dual plasma system which combines CCP and pulsed linear-antenna microwave plasma (PLAMWP). The influence of process conditions on the PM geometry was systematically studied by scanning electron microscopy (SEM). The process conditions were controlled by varying radiofrequency (RF) power, gas mixture (O2:CF4 ratio) and process duration. (en)
Title	Controlled structuring of self–assembled polystyrene microsphere arrays by two different plasma systems Controlled structuring of self–assembled polystyrene microsphere arrays by two different plasma systems (en)
skos:prefLabel	Controlled structuring of self–assembled polystyrene microsphere arrays by two different plasma systems Controlled structuring of self–assembled polystyrene microsphere arrays by two different plasma systems (en)
skos:notation	RIV/68378271:_____/13:00425765!RIV14-GA0-68378271
http://linked.open...avai/predkladatel	Fyzikální ústav AV ČR, v.v.i.
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(GA13-20110S), P(GAP108/12/0910)
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Domonkos, Mária Kromka, Alexander Ižák, Tibor
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	67004
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/13:00425765
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	nanosphere lithography; reactive ion etching; pulsed linear-antenna microwave plasma; polystyrene microspheres; Langmuir-Blodgett monolayers (en)
http://linked.open.../riv/klicoveSlovo	Langmuir-Blodgett monolayers nanosphere lithography polystyrene microspheres pulsed linear-antenna microwave plasma reactive ion etching
http://linked.open...ontrolniKodProRIV	[2961391A930A]
http://linked.open...v/mistoKonaniAkce	Brno
http://linked.open...i/riv/mistoVydani	Ostrava
http://linked.open...i/riv/nazevZdroje	NANOCON 2013 Conference Proceedings
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	New substrates and approaches for sensitive and reproducible biomolecular sensing by means of surface-enhanced Raman scattering (SERS) spectroscopy Fabrication, structuring and treatment of nanocrystalline diamonds for antibacterial studies
http://linked.open...UplatneniVysledku	2013
http://linked.open...iv/tvurceVysledku	Kromka, Alexander Ižák, Tibor Proška, J. Domonkos, Mária Štolcová, L.
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2013-10-16 (xsd:date)
number of pages	5 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Tanger s.r.o.
https://schema.org/isbn	978-80-87294-44-4

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