About: Nucleation of ultrathin silver layer by magnetron sputtering in Ar/N2 plasma

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Nucleation of ultrathin silver layer by magnetron sputtering in Ar/N2 plasma Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We focus our attention on the study of the initial stage of the silver growth. The silver layers were deposited by RF magnetron sputtering in pure argon or its mixture with nitrogen. The initial stage of the nucleation and the layer growth was studied by means of the optical and electrical monitoring,which are based on a principle of in-situ spectral ellipsometry. The measured data were fitted to a mathematical model. The nano-granular character of the grown layer is revealed by resonant features in the extinction coefficient spectra in visible spectral range. Thus, the mode of the layer growth (Volmer–Weber or Stranski–Krastanov) was clearly distinguished in the monitored data. The microstructure of the completed layer was further analyzed by X-ray diffraction (XRD) and atomic forcemicroscopy (AFM). In thiswork, we showthat the growthmode of the silver can be controlled by the deposition condition. We focus our attention on the study of the initial stage of the silver growth. The silver layers were deposited by RF magnetron sputtering in pure argon or its mixture with nitrogen. The initial stage of the nucleation and the layer growth was studied by means of the optical and electrical monitoring,which are based on a principle of in-situ spectral ellipsometry. The measured data were fitted to a mathematical model. The nano-granular character of the grown layer is revealed by resonant features in the extinction coefficient spectra in visible spectral range. Thus, the mode of the layer growth (Volmer–Weber or Stranski–Krastanov) was clearly distinguished in the monitored data. The microstructure of the completed layer was further analyzed by X-ray diffraction (XRD) and atomic forcemicroscopy (AFM). In thiswork, we showthat the growthmode of the silver can be controlled by the deposition condition. (en)
Title	Nucleation of ultrathin silver layer by magnetron sputtering in Ar/N2 plasma Nucleation of ultrathin silver layer by magnetron sputtering in Ar/N2 plasma (en)
skos:prefLabel	Nucleation of ultrathin silver layer by magnetron sputtering in Ar/N2 plasma Nucleation of ultrathin silver layer by magnetron sputtering in Ar/N2 plasma (en)
skos:notation	RIV/68378271:_____/13:00398554!RIV14-GA0-68378271
http://linked.open...avai/predkladatel	Fyzikální ústav AV ČR, v.v.i.
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(GAP108/11/1298), P(GP202/09/P324)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Lančok, Ján Drahokoupil, Jan Musil, Jindřich Novotný, Michal Fekete, Ladislav Bulíř, Jiří
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	92493
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/13:00398554
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	ultrathin silver; magnetron sputtering; spectral ellipsometry; in-situ monitoring (en)
http://linked.open.../riv/klicoveSlovo	magnetron sputtering in-situ monitoring spectral ellipsometry ultrathin silver
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[D31199B6ADD6]
http://linked.open...i/riv/nazevZdroje	Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced system for monitoring of the growth of metal nanostructures on dielectric substrate Detection layers based on composites of organocomplexes and nanoparticles for chemical sensors
http://linked.open...UplatneniVysledku	2013
http://linked.open...v/svazekPeriodika	228
http://linked.open...iv/tvurceVysledku	Drahokoupil, Jan Lančok, Ján Musil, Jindřich Novotný, Michal Bulíř, Jiří Fekete, Ladislav
http://linked.open...ain/vavai/riv/wos	000323628400020
issn	0257-8972
number of pages	5 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.surfcoat.2012.08.021

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software