About: Time-resolved Langmuir probe investigation of hybrid high power impulse magnetron sputtering discharges

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About: Time-resolved Langmuir probe investigation of hybrid high power impulse magnetron sputtering discharges Goto Sponge NotDistinct Permalink

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Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://www.sciencedirect.com/science/article/pii/S0042207X12001388
Description	The paper focuses on time-resolved diagnostics of unipolar hybrid-dual-High Power Impulse Magnetron Sputtering (hybrid-dual-HiPIMS) discharges. The newly developed sputtering system is based on a combination of dual-HiPIMS with a mid-frequency (MF) discharge. The most important feature of hybrid-dual-HiPIMS systems is the MF pre-ionization which causes/allows: (i) a significant reduction of working pressure by more than one order of magnitude, and (ii) faster ignition and development of HiPIMS pulses. Parameters such as mean electron energy, electron density and electron energy probability function (EEPF) were obtained from time-resolved Langmuir probe diagnostics to demonstrate the aforementioned effects. Calorimetric probe diagnostics were used for determination of the total power density flux. Power flux contributions of particular species, e.g. ions, electrons and neutrals, were estimated as well. The paper focuses on time-resolved diagnostics of unipolar hybrid-dual-High Power Impulse Magnetron Sputtering (hybrid-dual-HiPIMS) discharges. The newly developed sputtering system is based on a combination of dual-HiPIMS with a mid-frequency (MF) discharge. The most important feature of hybrid-dual-HiPIMS systems is the MF pre-ionization which causes/allows: (i) a significant reduction of working pressure by more than one order of magnitude, and (ii) faster ignition and development of HiPIMS pulses. Parameters such as mean electron energy, electron density and electron energy probability function (EEPF) were obtained from time-resolved Langmuir probe diagnostics to demonstrate the aforementioned effects. Calorimetric probe diagnostics were used for determination of the total power density flux. Power flux contributions of particular species, e.g. ions, electrons and neutrals, were estimated as well. (en)
Title	Time-resolved Langmuir probe investigation of hybrid high power impulse magnetron sputtering discharges Time-resolved Langmuir probe investigation of hybrid high power impulse magnetron sputtering discharges (en)
skos:prefLabel	Time-resolved Langmuir probe investigation of hybrid high power impulse magnetron sputtering discharges Time-resolved Langmuir probe investigation of hybrid high power impulse magnetron sputtering discharges (en)
skos:notation	RIV/68378271:_____/13:00391437!RIV14-GA0-68378271
http://linked.open...avai/predkladatel	Fyzikální ústav AV ČR, v.v.i.
http://linked.open...avai/riv/aktivita	I P Z
http://linked.open...avai/riv/aktivity	I, P(GAP205/11/0386), P(TA01010517), Z(AV0Z10100522)
http://linked.open...iv/cisloPeriodika	SI
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Čada, Martin Hubička, Zdeněk
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	111121
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/13:00391437
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	dual magnetron; HiPIMS; MF-discharge; Langmuir probe; EEPF (en)
http://linked.open.../riv/klicoveSlovo	dual magnetron Langmuir probe EEPF MF-discharge HiPIMS
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[284B374117B0]
http://linked.open...i/riv/nazevZdroje	Vacuum
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	7 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced experimental research of discharge plasma sources applied for deposition of nanostructured thin films Modern multilayer optical structures.
http://linked.open...UplatneniVysledku	2013
http://linked.open...v/svazekPeriodika	90
http://linked.open...iv/tvurceVysledku	Hubička, Zdeněk Drache, S. Hippler, R. Straňák, V. Čada, Martin Tichý, M. Herrendorf, A.-P.
http://linked.open...ain/vavai/riv/wos	000313089800031
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology
issn	0042-207X
number of pages	6 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.vacuum.2012.02.047

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