About: Time-resolved tunable diode laser absorption spectroscopy of excited argon and ground-state titanium atoms in pulsed magnetron discharges

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About: Time-resolved tunable diode laser absorption spectroscopy of excited argon and ground-state titanium atoms in pulsed magnetron discharges Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
rdfs:seeAlso	http://iopscience.iop.org/0963-0252/22/1/015002/
Description	Time-resolved investigations of excited argon atom density and temperature and ground-state titanium atom density during high-power impulse magnetron sputtering (HiPIMS, repetition frequency 100 Hz) and direct current pulsed magnetron (repetition frequency 2.5 kHz) discharges (PMDs) in argon employing a titanium target were performed. Atom density and temperature were measured with the help of tunable diode laser absorption spectroscopy. Excited argon atoms form during the discharge pulse and again by three-body electron ion recombination in the afterglow. Similarly, the temperature of excited (metastable) argon atoms rises during the plasma on phase and again during the afterglow. The observed temporal evolution of the temperature is faster than expected from thermal conductivity considerations. The time dependence of titanium atoms can be explained by recombination and diffusion. Time-resolved investigations of excited argon atom density and temperature and ground-state titanium atom density during high-power impulse magnetron sputtering (HiPIMS, repetition frequency 100 Hz) and direct current pulsed magnetron (repetition frequency 2.5 kHz) discharges (PMDs) in argon employing a titanium target were performed. Atom density and temperature were measured with the help of tunable diode laser absorption spectroscopy. Excited argon atoms form during the discharge pulse and again by three-body electron ion recombination in the afterglow. Similarly, the temperature of excited (metastable) argon atoms rises during the plasma on phase and again during the afterglow. The observed temporal evolution of the temperature is faster than expected from thermal conductivity considerations. The time dependence of titanium atoms can be explained by recombination and diffusion. (en)
Title	Time-resolved tunable diode laser absorption spectroscopy of excited argon and ground-state titanium atoms in pulsed magnetron discharges Time-resolved tunable diode laser absorption spectroscopy of excited argon and ground-state titanium atoms in pulsed magnetron discharges (en)
skos:prefLabel	Time-resolved tunable diode laser absorption spectroscopy of excited argon and ground-state titanium atoms in pulsed magnetron discharges Time-resolved tunable diode laser absorption spectroscopy of excited argon and ground-state titanium atoms in pulsed magnetron discharges (en)
skos:notation	RIV/68378271:_____/13:00391436!RIV14-GA0-68378271
http://linked.open...avai/predkladatel	Fyzikální ústav AV ČR, v.v.i.
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GAP108/12/2104), P(GAP205/11/0386), Z(AV0Z10100522)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Čada, Martin Hubička, Zdeněk
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	111125
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/13:00391436
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	absorption spectroscopy; diode laser; magnetron; argon metastable; HiPIMS; titanium; time-resolved (en)
http://linked.open.../riv/klicoveSlovo	diode laser magnetron argon metastable time-resolved HiPIMS absorption spectroscopy titanium
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[5895CB971710]
http://linked.open...i/riv/nazevZdroje	Plasma Sources Science & Technology
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced experimental research of discharge plasma sources applied for deposition of nanostructured thin films Advanced semiconductor materials for photoelectrochemical water splitting
http://linked.open...UplatneniVysledku	2013
http://linked.open...v/svazekPeriodika	22
http://linked.open...iv/tvurceVysledku	Hubička, Zdeněk Hippler, R. Čada, Martin Do, H. T. Sushkov, V.
http://linked.open...ain/vavai/riv/wos	000314966300007
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology
issn	0963-0252
number of pages	10 (xsd:int)
http://bibframe.org/vocab/doi	10.1088/0963-0252/22/1/015002

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