About: Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this work, we investigate the composition profile of nanocrystalline Pb(Zr,Ti)O3 (PZT) thin films deposited by means of reactive magnetron sputtering from 200 mm diameter metallic targets (Pb, Ti, Zr). High-power pulse sputtering has been employed for alternatively the Zr- or Ti-target. Composition analysis and profiling was performed by means of X-ray photoelectron spectroscopy (XPS) and Rutherford backscattering (RBS). RBS data was recalibrated to exclude hydrogen content not determined by XPS. Advantages and drawbacks of both methods for PZT composition profiling are discussed. In this work, we investigate the composition profile of nanocrystalline Pb(Zr,Ti)O3 (PZT) thin films deposited by means of reactive magnetron sputtering from 200 mm diameter metallic targets (Pb, Ti, Zr). High-power pulse sputtering has been employed for alternatively the Zr- or Ti-target. Composition analysis and profiling was performed by means of X-ray photoelectron spectroscopy (XPS) and Rutherford backscattering (RBS). RBS data was recalibrated to exclude hydrogen content not determined by XPS. Advantages and drawbacks of both methods for PZT composition profiling are discussed. (en)
Title	Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates (en)
skos:prefLabel	Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates (en)
skos:notation	RIV/68378271:_____/12:00391185!RIV13-AV0-68378271
http://linked.open...avai/predkladatel	Fyzikální ústav AV ČR, v.v.i.
http://linked.open...avai/riv/aktivita	Z
http://linked.open...avai/riv/aktivity	Z(AV0Z10100522)
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Čada, Martin Hubička, Zdeněk Jastrabík, Lubomír Dejneka, Alexandr
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	128235
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/12:00391185
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	PZT; thin film; polymer substrate; XPS; RBS (en)
http://linked.open.../riv/klicoveSlovo	polymer substrate XPS thin film PZT RBS
http://linked.open...ontrolniKodProRIV	[032F10F0ABC5]
http://linked.open...v/mistoKonaniAkce	Aveiro
http://linked.open...i/riv/mistoVydani	New York
http://linked.open...i/riv/nazevZdroje	2012 International Symposium on Applications of Ferroelectrics held jointly with 11th IEEE ECAPD and IEEE PFM (ISAF/ECAPD/PFM)
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	9 (xsd:int)
http://linked.open...UplatneniVysledku	2012
http://linked.open...iv/tvurceVysledku	Dejneka, Alexandr Jastrabík, Lubomír Adolphi, B. Gerlach, G. Hubička, Zdeněk Suchaneck, G. Čada, Martin Kleiner, A. Lavrentiev, V.
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open...ain/vavai/riv/wos	000313016400058
http://linked.open.../riv/zahajeniAkce	2012-07-09 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology
number of pages	3 (xsd:int)
http://purl.org/ne...btex#hasPublisher	IEEE - Institute of Electrical and Electronics Engineers
https://schema.org/isbn	978-1-4673-2669-8
is http://linked.open...avai/riv/vysledek of	Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates

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