About: Low temperature diamond growth by linear antenna plasma CVD over large area

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Low temperature diamond growth by linear antenna plasma CVD over large area Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this work, we report on the large area (20 30 cm2) and low temperature (250 °C) polycrystalline diamond growth by pulsed linear antenna microwave plasma system. The influence of substrate temperature varied from 250 to 680 °C, as controlled by the table heater and/or by microwave power, is studied. It was found that the growth rate, film morphology and diamond to non-diamond phases (sp3/sp2 carbon bonds) are influenced by the growth temperature, as confirmed by SEM and Raman measurements. The surface chemistry and growth processes were studied in terms of activation energies (Ea) calculated from Arrhenius plots. The activation energies of growth processes were very low (1.7 and 7.8 kcal mol1) indicating an energetically favourable growth process from the CO2CH4H2 gas mixture. In addition, from activation energies two different growth regimes were observed at low and high temperatures, indicating different growth mechanism. In this work, we report on the large area (20 30 cm2) and low temperature (250 °C) polycrystalline diamond growth by pulsed linear antenna microwave plasma system. The influence of substrate temperature varied from 250 to 680 °C, as controlled by the table heater and/or by microwave power, is studied. It was found that the growth rate, film morphology and diamond to non-diamond phases (sp3/sp2 carbon bonds) are influenced by the growth temperature, as confirmed by SEM and Raman measurements. The surface chemistry and growth processes were studied in terms of activation energies (Ea) calculated from Arrhenius plots. The activation energies of growth processes were very low (1.7 and 7.8 kcal mol1) indicating an energetically favourable growth process from the CO2CH4H2 gas mixture. In addition, from activation energies two different growth regimes were observed at low and high temperatures, indicating different growth mechanism. (en)
Title	Low temperature diamond growth by linear antenna plasma CVD over large area Low temperature diamond growth by linear antenna plasma CVD over large area (en)
skos:prefLabel	Low temperature diamond growth by linear antenna plasma CVD over large area Low temperature diamond growth by linear antenna plasma CVD over large area (en)
skos:notation	RIV/68378271:_____/12:00390484!RIV13-GA0-68378271
http://linked.open...avai/predkladatel	Fyzikální ústav AV ČR, v.v.i.
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GBP108/12/G108), Z(AV0Z10100522)
http://linked.open...iv/cisloPeriodika	12
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Kromka, Alexander Potocký, Štěpán Varga, Marián Babchenko, Oleg Ižák, Tibor
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	147510
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/12:00390484
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	activation energy; growth kinetics; linear antenna microwave CVD; low temperature; polycrystalline diamond ﬁlms (en)
http://linked.open.../riv/klicoveSlovo	activation energy low temperature growth kinetics linear antenna microwave CVD polycrystalline diamond ﬁlms
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[15523586844C]
http://linked.open...i/riv/nazevZdroje	Physica Status Solidi B-Basic Solid State Physics
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Preparation, modification and characterization of materials by radiation
http://linked.open...UplatneniVysledku	2012
http://linked.open...v/svazekPeriodika	249
http://linked.open...iv/tvurceVysledku	Babchenko, Oleg Kromka, Alexander Ižák, Tibor Potocký, Štěpán Varga, Marián
http://linked.open...ain/vavai/riv/wos	000312215300071
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology
issn	0370-1972
number of pages	4 (xsd:int)
http://bibframe.org/vocab/doi	10.1002/pssb.201200103
is http://linked.open...avai/riv/vysledek of	Low temperature diamond growth by linear antenna plasma CVD over large area

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software