About: Etching effects of low temperature hydrogen plasma on encapsulated diamond transistors

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We study etching effects of low temperature hydrogen plasma treatment (200–300 $C) in two different microwave plasma reactors (linear and focused plasma) on diamond solutiongated field-effect transistors with various polymers for encapsulation (MA-P, OFPR, SU8). Three-dimensional transistor microstructures (20 μm) are grown from nanocrystalline H-terminated intrinsic diamond byMW-CVD on Si/SiO2 substrates. We study etching effects of low temperature hydrogen plasma treatment (200–300 $C) in two different microwave plasma reactors (linear and focused plasma) on diamond solutiongated field-effect transistors with various polymers for encapsulation (MA-P, OFPR, SU8). Three-dimensional transistor microstructures (20 μm) are grown from nanocrystalline H-terminated intrinsic diamond byMW-CVD on Si/SiO2 substrates. (en)
Title	Etching effects of low temperature hydrogen plasma on encapsulated diamond transistors Etching effects of low temperature hydrogen plasma on encapsulated diamond transistors (en)
skos:prefLabel	Etching effects of low temperature hydrogen plasma on encapsulated diamond transistors Etching effects of low temperature hydrogen plasma on encapsulated diamond transistors (en)
skos:notation	RIV/68378271:_____/12:00390080!RIV13-GA0-68378271
http://linked.open...avai/predkladatel	Fyzikální ústav AV ČR, v.v.i.
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GAP108/12/0996), P(GBP108/12/G108), P(GD202/09/H041), Z(AV0Z10100521)
http://linked.open...iv/cisloPeriodika	2
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Krátká, Marie Kromka, Alexander Rezek, Bohuslav Neykova, Neda
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	134833
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/12:00390080
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	encapsulated diamond transistors; hydrogen plasma (en)
http://linked.open.../riv/klicoveSlovo	encapsulated diamond transistors hydrogen plasma
http://linked.open...odStatuVydavatele	CZ - Česká republika
http://linked.open...ontrolniKodProRIV	[5F9AE6F3CBC9]
http://linked.open...i/riv/nazevZdroje	Acta Universitatis Carolinae. Mathematica et Physica
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Preparation, modification and characterization of materials by radiation Physics of nanostructures Bio-inspired Scaffolds as Active Sensor Systems
http://linked.open...UplatneniVysledku	2012
http://linked.open...v/svazekPeriodika	53
http://linked.open...iv/tvurceVysledku	Kromka, Alexander Krátká, Marie Rezek, Bohuslav Neykova, Neda
http://linked.open...n/vavai/riv/zamer	Physics and technology of nanostructures, surfaces and thin films
issn	0001-7140
number of pages	7 (xsd:int)
is http://linked.open...avai/riv/vysledek of	Etching effects of low temperature hydrogen plasma on encapsulated diamond transistors

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