About: Structuring of diamond films by reactive ion plasma etching

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this study, two common strategies of diamond film structuring are described. Main focus is on the comparison of top-down and the bottom-up strategies. The top-down strategy is primary related to dry reactive ion etching through masking materials (or even without mask), while bottom-up strategy is based on selective area deposition of diamond film. Several methods of both strategies are demonstrated in details in the article, regarding to their properties and basic principles. In this study, two common strategies of diamond film structuring are described. Main focus is on the comparison of top-down and the bottom-up strategies. The top-down strategy is primary related to dry reactive ion etching through masking materials (or even without mask), while bottom-up strategy is based on selective area deposition of diamond film. Several methods of both strategies are demonstrated in details in the article, regarding to their properties and basic principles. (en)
Title	Structuring of diamond films by reactive ion plasma etching Structuring of diamond films by reactive ion plasma etching (en)
skos:prefLabel	Structuring of diamond films by reactive ion plasma etching Structuring of diamond films by reactive ion plasma etching (en)
skos:notation	RIV/68378271:_____/12:00389420!RIV13-GA0-68378271
http://linked.open...avai/predkladatel	Fyzikální ústav AV ČR, v.v.i.
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GAP108/11/0794), P(GAP108/12/0910), P(IAAX00100902), Z(AV0Z10100521)
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Kromka, Alexander Ižák, Tibor
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	171916
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/12:00389420
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	nanostructuring; diamond thin films; reactive ion etching; scanning electron microscopy (en)
http://linked.open.../riv/klicoveSlovo	nanostructuring diamond thin films reactive ion etching scanning electron microscopy
http://linked.open...ontrolniKodProRIV	[C46DF1E9A657]
http://linked.open...v/mistoKonaniAkce	Praha
http://linked.open...i/riv/mistoVydani	Praha
http://linked.open...i/riv/nazevZdroje	Nanomateriály a nanotechnologie ve stavebnictví 2012 (NaNS 2012)
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Fabrication, structuring and treatment of nanocrystalline diamonds for antibacterial studies Visualization of collagen production in osteogenic cells cultivated on nanocrystalline diamond films Electronically and chemically optimized nanocrystalline diamond structures for bio-applications
http://linked.open...UplatneniVysledku	2012
http://linked.open...iv/tvurceVysledku	Kromka, Alexander Ižák, Tibor Domonkos, M. Proška, J.
http://linked.open...vavai/riv/typAkce	CST - Celostátní
http://linked.open.../riv/zahajeniAkce	2012-09-11 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Physics and technology of nanostructures, surfaces and thin films
number of pages	6 (xsd:int)
http://purl.org/ne...btex#hasPublisher	České vysoké učení technické v Praze
https://schema.org/isbn	978-80-01-05132-0
is http://linked.open...avai/riv/vysledek of	Structuring of diamond films by reactive ion plasma etching

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