About: µc-Si solar cells by direct deposition with APCVD

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The rapid thermal direct deposition of micro-crystalline silicon (μc-Si) layers by atmospheric pressure chemical vapour deposition (APCVD) can be done on different intermediate layers. The deposition is done at temperatures between 850 °C and 1150 °C. A deposition rate of 1.6 μm/min has been achieved using standard process conditions. The microcrystalline structure changes depending on the deposition temperature and the layer thickness. Electron backscatter diffraction measurements show grain sizes of 0.5-10.0 μm with a columnar structure. Based on these process parameters and material properties the μc-Si layers have been simulated and optimised for two different solar cell concepts featuring different metallisation schemes and a comparison between epitaxial μc-Si emitter, diffused POCl3 emitter, and plasma enhanced chemical vapour deposition (PECVD) deposited a-Si heterojunction solar cells. The rapid thermal direct deposition of micro-crystalline silicon (μc-Si) layers by atmospheric pressure chemical vapour deposition (APCVD) can be done on different intermediate layers. The deposition is done at temperatures between 850 °C and 1150 °C. A deposition rate of 1.6 μm/min has been achieved using standard process conditions. The microcrystalline structure changes depending on the deposition temperature and the layer thickness. Electron backscatter diffraction measurements show grain sizes of 0.5-10.0 μm with a columnar structure. Based on these process parameters and material properties the μc-Si layers have been simulated and optimised for two different solar cell concepts featuring different metallisation schemes and a comparison between epitaxial μc-Si emitter, diffused POCl3 emitter, and plasma enhanced chemical vapour deposition (PECVD) deposited a-Si heterojunction solar cells. (en)
Title	µc-Si solar cells by direct deposition with APCVD µc-Si solar cells by direct deposition with APCVD (en)
skos:prefLabel	µc-Si solar cells by direct deposition with APCVD µc-Si solar cells by direct deposition with APCVD (en)
skos:notation	RIV/68378271:_____/12:00386627!RIV13-AV0-68378271
http://linked.open...avai/predkladatel	Fyzikální ústav AV ČR, v.v.i.
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(7E10061), P(LM2011026), Z(AV0Z10100521)
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Fejfar, Antonín Ledinský, Martin
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	129140
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/12:00386627
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	epitaxy; thin film solar cell; a-Si/µ-Si; microcrystalline silicon; Si film (en)
http://linked.open.../riv/klicoveSlovo	epitaxy microcrystalline silicon Si film a-Si/µ-Si thin film solar cell
http://linked.open...ontrolniKodProRIV	[4EEF8489576E]
http://linked.open...v/mistoKonaniAkce	Frankfurt
http://linked.open...i/riv/mistoVydani	München
http://linked.open...i/riv/nazevZdroje	Proceedings of the 27th European Photovoltaic Solar Energy Conference and Exhibition
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Zlepšené fotovoltaické moduly založené na polykrystalickém křemíku na skle (Improved Polycrystalline-Silicon Modules on Glass Substrates) Laboratory of nanstructures and nanomaterials
http://linked.open...UplatneniVysledku	2012
http://linked.open...iv/tvurceVysledku	Ledinský, Martin Fejfar, Antonín Janz, S. Rachow, T. Reber, S.
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2012-09-24 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Physics and technology of nanostructures, surfaces and thin films
number of pages	7 (xsd:int)
http://bibframe.org/vocab/doi	10.4229/27thEUPVSEC2012-3CV.2.7
http://purl.org/ne...btex#hasPublisher	WIP Wirtschaft und Infrastruktur GmbH & Co Planungs KG
https://schema.org/isbn	3-936338-28-0
is http://linked.open...avai/riv/vysledek of	µc-Si solar cells by direct deposition with APCVD

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