About: Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The paper reports on design, fabrication and characterization of piezoresistive sensors based on boron doped nanocrystalline diamond (NCD) layers. The piezoresistive sensing boron doped diamond thin films were realized on SiO2/Si3N4/Si substrates by microwave plasma enhanced chemical vapor deposition (CVD) and the piezoresistive structures were formed by reactive ion etching. The highest gauge factor at higher temperatures (GF = 7.2 at 250 °C) was observed for moderate doping level (boron to carbon ratio of 3000 ppm). One of the aims was the extraction of piezoresistive coefficients of fabricated diamond layers for utilization in a finite element piezoresistive solver. The paper reports on design, fabrication and characterization of piezoresistive sensors based on boron doped nanocrystalline diamond (NCD) layers. The piezoresistive sensing boron doped diamond thin films were realized on SiO2/Si3N4/Si substrates by microwave plasma enhanced chemical vapor deposition (CVD) and the piezoresistive structures were formed by reactive ion etching. The highest gauge factor at higher temperatures (GF = 7.2 at 250 °C) was observed for moderate doping level (boron to carbon ratio of 3000 ppm). One of the aims was the extraction of piezoresistive coefficients of fabricated diamond layers for utilization in a finite element piezoresistive solver. (en)
Title	Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers (en)
skos:prefLabel	Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers (en)
skos:notation	RIV/68378271:_____/12:00385048!RIV13-AV0-68378271
http://linked.open...avai/predkladatel	Fyzikální ústav AV ČR, v.v.i.
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA102/09/1601), P(IAAX00100902), P(KAN400100701), Z(AV0Z10100521), Z(MSM6840770015)
http://linked.open...iv/cisloPeriodika	6
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Kromka, Alexander Babchenko, Oleg
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	130250
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/12:00385048
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	piezoresistive coefficients; piezoresistivity; nanocrystalline diamond; FEM (en)
http://linked.open.../riv/klicoveSlovo	FEM piezoresistivity piezoresistive coefficients nanocrystalline diamond
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[6171E5BD6812]
http://linked.open...i/riv/nazevZdroje	Vacuum
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Intelligent micro and nano structures for microsensors realized with support of nanotechnology Functional hybrid nanosystems of semiconductors and metals with organic materials (FUNS) Electronically and chemically optimized nanocrystalline diamond structures for bio-applications
http://linked.open...UplatneniVysledku	2012
http://linked.open...v/svazekPeriodika	86
http://linked.open...iv/tvurceVysledku	Babchenko, Oleg Haenen, K. Kromka, Alexander Husák, M. Kulha, P.
http://linked.open...ain/vavai/riv/wos	000301018400025
http://linked.open...n/vavai/riv/zamer	Physics and technology of nanostructures, surfaces and thin films Research of Methods and Systems for Measurement of Physical Quantities and Measured Data Processing.
issn	0042-207X
number of pages	4 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.vacuum.2011.07.022
is http://linked.open...avai/riv/vysledek of	Design and fabrication of piezoresistive strain gauges based on nanocrystalline diamond layers

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 77 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software