About: Generating ordered Si nanocrystals via atomic force microscopy

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We describe two successful routes for generating ordered arrays of Si nanocrystals by using atomic force microscopy (AFM) and amorphous silicon thin films (200–400 nm) on Ti/Ni coated glass substrates. First, we show that field-enhanced metal-induced solid phase crystallization at room temperature can be miniaturized to achieve highly spatially localized (below 100 nm) current-induced crystallization of the amorphous silicon films using a sharp tip in AFM. In the second route, resistive nano-pits are formed at controlled positions in the amorphous silicon thin films by adjusting (lowering and/or stabilizing) the exposure currents in the AFM process. Such templated substrates are further used to induce localized growth of Si nanocrystals in plasma-enhanced chemical vapor deposition process. In both cases the crystalline phase is identified in situ as features of enhanced current in current-sensing AFM maps. We describe two successful routes for generating ordered arrays of Si nanocrystals by using atomic force microscopy (AFM) and amorphous silicon thin films (200–400 nm) on Ti/Ni coated glass substrates. First, we show that field-enhanced metal-induced solid phase crystallization at room temperature can be miniaturized to achieve highly spatially localized (below 100 nm) current-induced crystallization of the amorphous silicon films using a sharp tip in AFM. In the second route, resistive nano-pits are formed at controlled positions in the amorphous silicon thin films by adjusting (lowering and/or stabilizing) the exposure currents in the AFM process. Such templated substrates are further used to induce localized growth of Si nanocrystals in plasma-enhanced chemical vapor deposition process. In both cases the crystalline phase is identified in situ as features of enhanced current in current-sensing AFM maps. (en)
Title	Generating ordered Si nanocrystals via atomic force microscopy Generating ordered Si nanocrystals via atomic force microscopy (en)
skos:prefLabel	Generating ordered Si nanocrystals via atomic force microscopy Generating ordered Si nanocrystals via atomic force microscopy (en)
skos:notation	RIV/68378271:_____/12:00383786!RIV13-GA0-68378271
http://linked.open...avai/predkladatel	Fyzikální ústav AV ČR, v.v.i.
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GD202/09/H041), P(KAN400100701), P(LC06040), P(LC510), Z(AV0Z10100521)
http://linked.open...iv/cisloPeriodika	17
http://linked.open...vai/riv/dodaniDat	2013
http://linked.open...aciTvurceVysledku	Stuchlík, Jiří Rezek, Bohuslav Kočka, Jan Šípek, Emil Verveniotis, Elisseos
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	137848
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/12:00383786
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	AFM; CS-AFM; a-Si:H; electric crystallization; nickel (en)
http://linked.open.../riv/klicoveSlovo	nickel CS-AFM a-Si:H electric crystallization AFM
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[A0EE95D45F7F]
http://linked.open...i/riv/nazevZdroje	Journal of Non-Crystalline Solids
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Center of nanotechnology and materials for nanoelectronics Physics of nanostructures Functional hybrid nanosystems of semiconductors and metals with organic materials (FUNS) Structures for Nanophotonics and Nanoelectronics
http://linked.open...UplatneniVysledku	2012
http://linked.open...v/svazekPeriodika	358
http://linked.open...iv/tvurceVysledku	Rezek, Bohuslav Stuchlík, Jiří Verveniotis, Elisseos Kočka, Jan Šípek, Emil
http://linked.open...ain/vavai/riv/wos	000310394700046
http://linked.open...n/vavai/riv/zamer	Physics and technology of nanostructures, surfaces and thin films
issn	0022-3093
number of pages	4 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.jnoncrysol.2011.12.018
is http://linked.open...avai/riv/vysledek of	Generating ordered Si nanocrystals via atomic force microscopy

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