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  • Elastic properties of diamond-like carbon (DLC) layers with gradient carbon–silicon interlayer were studied by resonant ultrasound spectroscopy (RUS) and standard nano-indentation technique. The DLC layers were prepared by pulsed laser deposition on SiC/Si substrates. The RUS method is based on modal analysis of the specimen vibration. The resonant frequency shifts caused by the layer are for the evaluation of the dynamic inplane elastic properties of the deposited DLC. The results were compared with the quasi-statical quantities - Young's modulus and hardness, obtained by nanoindentation using the AFM tip.
  • Elastic properties of diamond-like carbon (DLC) layers with gradient carbon–silicon interlayer were studied by resonant ultrasound spectroscopy (RUS) and standard nano-indentation technique. The DLC layers were prepared by pulsed laser deposition on SiC/Si substrates. The RUS method is based on modal analysis of the specimen vibration. The resonant frequency shifts caused by the layer are for the evaluation of the dynamic inplane elastic properties of the deposited DLC. The results were compared with the quasi-statical quantities - Young's modulus and hardness, obtained by nanoindentation using the AFM tip. (en)
Title
  • Evaluation of elastic properties of DLC layers using resonant ultrasound spectroscopy and AFM nanoindentation
  • Evaluation of elastic properties of DLC layers using resonant ultrasound spectroscopy and AFM nanoindentation (en)
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  • Evaluation of elastic properties of DLC layers using resonant ultrasound spectroscopy and AFM nanoindentation
  • Evaluation of elastic properties of DLC layers using resonant ultrasound spectroscopy and AFM nanoindentation (en)
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  • RIV/68378271:_____/11:00364639!RIV12-AV0-68378271
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  • P(GA101/09/0702), S, Z(AV0Z10100522), Z(AV0Z20760514)
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  • 2
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  • 198296
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  • RIV/68378271:_____/11:00364639
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  • RUS-resonant ultrasound spectroscopy; PLD; diamond-like carbon; elastic properties; AFM nanoindentation (en)
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  • CH - Švýcarská konfederace
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  • [7963B870CAAB]
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  • Surface and Coatings Technology
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  • 205
http://linked.open...iv/tvurceVysledku
  • Jelínek, Miroslav
  • Kocourek, Tomáš
  • Landa, Michal
  • Mikšovský, Jan
  • Kopeček, Jaromír
  • Růžek, Michal
http://linked.open...ain/vavai/riv/wos
  • 000293258600014
http://linked.open...n/vavai/riv/zamer
issn
  • 0257-8972
number of pages
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  • 10.1016/j.surfcoat.2011.01.038
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