About: Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Ultrathin nanostructured metal films exhibit unusual properties and performances. Film functional properties depend strongly on the nanostructure that can be manipulated by varying nucleation and growth conditions. Hence, in order to control the nanostructure of aluminium thin film fabricated by RF magnetron sputtering, we focus on in-situ monitoring of electrical and optical properties of the growing layer as well as plasma characterization by mass and optical emission spectroscopy. The electrical conductivity and I-V characteristics were measured. The optical constants were obtained from optical monitoring based on a spectral ellipsometry. The relevant models (based on one or two Lorentz oscillators and B-spline function) are suggested to evaluate the data obtained from the monitoring techniques. The results of the in-situ monitoring are correlated with SEM analyses. We demonstrate the monitoring can distinguish the growth mode in the real-time. Ultrathin nanostructured metal films exhibit unusual properties and performances. Film functional properties depend strongly on the nanostructure that can be manipulated by varying nucleation and growth conditions. Hence, in order to control the nanostructure of aluminium thin film fabricated by RF magnetron sputtering, we focus on in-situ monitoring of electrical and optical properties of the growing layer as well as plasma characterization by mass and optical emission spectroscopy. The electrical conductivity and I-V characteristics were measured. The optical constants were obtained from optical monitoring based on a spectral ellipsometry. The relevant models (based on one or two Lorentz oscillators and B-spline function) are suggested to evaluate the data obtained from the monitoring techniques. The results of the in-situ monitoring are correlated with SEM analyses. We demonstrate the monitoring can distinguish the growth mode in the real-time. (en)
Title	Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth (en)
skos:prefLabel	Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth (en)
skos:notation	RIV/68378271:_____/10:00351617!RIV11-GA0-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GP202/09/P324), P(IAA100100718), P(IAA100100729), P(KAN400100653), Z(AV0Z10100522)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Lančok, Ján Pokorný, Petr Novotný, Michal Bodnár, Michal Bulíř, Jiří
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	258649
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/10:00351617
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	aluminium ultra thin film; magnetron sputtering; in-situ monitoring; electrical conductivity; spectral ellipsometry; optical emission spectroscopy (en)
http://linked.open.../riv/klicoveSlovo	magnetron sputtering in-situ monitoring spectral ellipsometry optical emission spectroscopy electrical conductivity aluminium ultra thin film
http://linked.open...ontrolniKodProRIV	[9D18B9480B2B]
http://linked.open...v/mistoKonaniAkce	San Diego
http://linked.open...i/riv/mistoVydani	Bellingham
http://linked.open...i/riv/nazevZdroje	Nanostructured Thin Films III
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Self-organized magnetic nanostructures Advanced system for monitoring of the growth of metal nanostructures on dielectric substrate Metal-dielectric nanostructures for optics Development of novel hybrid deposition techniques for preparation of nanostructured fluoride thin films exhibiting outstanding fluorescent properties
http://linked.open...UplatneniVysledku	2010
http://linked.open...iv/tvurceVysledku	Lančok, Ján Novotný, Michal Pokorný, Petr Piksová, K. Bodnár, Michal Bulíř, Jiří
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2010-08-04 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology
number of pages	8 (xsd:int)
http://purl.org/ne...btex#hasPublisher	SPIE
https://schema.org/isbn	9780819482624
is http://linked.open...avai/riv/vysledek of	Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth Fabrication of nanostructured aluminium thin film and in-situ monitoring of the growth

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