About: Selective area deposition of diamond structures

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The report is about selective area deposition of diamond structures after the reactive ion etching and using a photo-resist as mask. The report is about selective area deposition of diamond structures after the reactive ion etching and using a photo-resist as mask. (en)
Title	Selective area deposition of diamond structures Selective area deposition of diamond structures (en)
skos:prefLabel	Selective area deposition of diamond structures Selective area deposition of diamond structures (en)
skos:notation	RIV/68378271:_____/09:00339576!RIV10-MSM-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(KAN400100701), P(LC510), Z(AV0Z10100521), Z(MSM6840770021)
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Kromka, Alexander Hruška, Karel Vaněček, Milan Babchenko, Oleg
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	340651
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/09:00339576
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	selective area deposition; plasma etching; polymer mask (en)
http://linked.open.../riv/klicoveSlovo	plasma etching selective area deposition polymer mask
http://linked.open...ontrolniKodProRIV	[198AE368DFF7]
http://linked.open...v/mistoKonaniAkce	Bystrá, Liptovský Ján
http://linked.open...i/riv/mistoVydani	Zilina
http://linked.open...i/riv/nazevZdroje	Proceedings of the 15th International Conference on Applied Physics of Condensed Matter
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Center of nanotechnology and materials for nanoelectronics Functional hybrid nanosystems of semiconductors and metals with organic materials (FUNS)
http://linked.open...UplatneniVysledku	2009
http://linked.open...iv/tvurceVysledku	Babchenko, Oleg Hruška, Karel Kromka, Alexander Vaněček, Milan
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open.../riv/zahajeniAkce	2009-06-24 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Physics and technology of nanostructures, surfaces and thin films Characterization of materials
number of pages	5 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Žilinská univerzita v Žiline
https://schema.org/isbn	978-80-554-0057-0
is http://linked.open...avai/riv/vysledek of	Selective area deposition of diamond structures Selective area deposition of diamond structures Selective area deposition of diamond structures Selective area deposition of diamond structures

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