About: Titania seed layers for PZT thin film growth on copper-coated Kapton films

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	n this work, we investigate the deposition of crystallization-promoting amorphous titania seed layers onto Cu-coated Kapton (R) HN foils for a subsequent PZT thin film fabrication thereon. Ultrathin TiO2-x layers with controlled stoichiometry were deposited by reactive sputtering at low substrate temperatures. X-ray photoelectron spectroscopy revealed that the Ti4+ ion in the seed layer was stable against Ar+ bombardment-induced reduction while CuO was reduced to Cu2O. Adsorbed moisture, organic solvents and carbon contaminations were quickly removed by Ar+ ion bombardment. (111)-textured PZT was fabricated on seed-layer-coated flexible substrates by means of a RF-modulated plasma jet system. n this work, we investigate the deposition of crystallization-promoting amorphous titania seed layers onto Cu-coated Kapton (R) HN foils for a subsequent PZT thin film fabrication thereon. Ultrathin TiO2-x layers with controlled stoichiometry were deposited by reactive sputtering at low substrate temperatures. X-ray photoelectron spectroscopy revealed that the Ti4+ ion in the seed layer was stable against Ar+ bombardment-induced reduction while CuO was reduced to Cu2O. Adsorbed moisture, organic solvents and carbon contaminations were quickly removed by Ar+ ion bombardment. (111)-textured PZT was fabricated on seed-layer-coated flexible substrates by means of a RF-modulated plasma jet system. (en)
Title	Titania seed layers for PZT thin film growth on copper-coated Kapton films Titania seed layers for PZT thin film growth on copper-coated Kapton films (en)
skos:prefLabel	Titania seed layers for PZT thin film growth on copper-coated Kapton films Titania seed layers for PZT thin film growth on copper-coated Kapton films (en)
skos:notation	RIV/68378271:_____/09:00336552!RIV10-AV0-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GC202/09/J017), P(KJB100100703), Z(AV0Z10100522)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Hubička, Zdeněk Jastrabík, Lubomír Dejneka, Alexandr
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	346403
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/09:00336552
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	copper coated Kapton; seed layer; seed layer; plasma deposition; XPS (en)
http://linked.open.../riv/klicoveSlovo	seed layer XPS plasma deposition copper coated Kapton
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[AB3D34A2C1AA]
http://linked.open...i/riv/nazevZdroje	Integrated Ferroelectrics
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	3 (xsd:int)
http://linked.open...cetTvurcuVysledku	8 (xsd:int)
http://linked.open...vavai/riv/projekt	Low Temperature Plasma Deposition of Perovskite Thin Films on Base Metal and Polymer Substrates Doped thin-layer structures of ZnO and TiO2
http://linked.open...UplatneniVysledku	2009
http://linked.open...v/svazekPeriodika	108
http://linked.open...iv/tvurceVysledku	Dejneka, Alexandr Jastrabík, Lubomír Adolphi, B. Gerlach, G. Hubička, Zdeněk Suchaneck, G. Volkonskiy, O. Bertram, M.
http://linked.open...ain/vavai/riv/wos	000271511000007
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology
issn	1058-4587
number of pages	10 (xsd:int)
is http://linked.open...avai/riv/vysledek of	Titania seed layers for PZT thin film growth on copper-coated Kapton films Titania seed layers for PZT thin film growth on copper-coated Kapton films Titania seed layers for PZT thin film growth on copper-coated Kapton films Titania seed layers for PZT thin film growth on copper-coated Kapton films

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