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rdf:type
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Description
| - In this work, the synthesis of (111)-textured PZT on Cu-coated polymer substrates is demonstrated by means of a RF-modulated plasma-jet system comprising a hollow cathode for reactive sputtering. Ion bombardment during film growth and lead stoichiometry are shown to be key parameters for the improvement of the PZT thin film quality.
- In this work, the synthesis of (111)-textured PZT on Cu-coated polymer substrates is demonstrated by means of a RF-modulated plasma-jet system comprising a hollow cathode for reactive sputtering. Ion bombardment during film growth and lead stoichiometry are shown to be key parameters for the improvement of the PZT thin film quality. (en)
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Title
| - Deposition of PZT Thin Films on Copper-Coated Polymer Foils-Challenges and Perspectives
- Deposition of PZT Thin Films on Copper-Coated Polymer Foils-Challenges and Perspectives (en)
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skos:prefLabel
| - Deposition of PZT Thin Films on Copper-Coated Polymer Foils-Challenges and Perspectives
- Deposition of PZT Thin Films on Copper-Coated Polymer Foils-Challenges and Perspectives (en)
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skos:notation
| - RIV/68378271:_____/09:00336530!RIV10-AV0-68378271
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(GC202/09/J017), P(KJB100100703), Z(AV0Z10100522)
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/68378271:_____/09:00336530
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - reactive sputter-deposition; plasma-jet system; hydrothermal method (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
| - GB - Spojené království Velké Británie a Severního Irska
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Dejneka, Alexandr
- Jastrabík, Lubomír
- Meyer, B.
- Gerlach, G.
- Hubička, Zdeněk
- Suchaneck, G.
- Guenther, M.
- Guenther, S.
- Schultheiss, E.
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http://linked.open...ain/vavai/riv/wos
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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is http://linked.open...avai/riv/vysledek
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