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rdf:type
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Description
| - High-surface-quality amorphous carbon (a-C) optical coatings with a thickness of 45 nm, deposited by magnetron sputtering on a silicon substrate, were irradiated by the 46.9 nm focused beam of capillary-discharge Ne-like Ar extreme ultraviolet laser. It has been found that an accumulation of 10, 20, and 40 shots at a fluence of 0.5 J/cm(2), i.e., below the single-shot damage threshold, causes irreversible changes of thin a-C layers, which can be registered by both the AFM and the DIC microscopy. In the center of the damaged area, AFM shows a-C removal to a maximum depth of 0.3, 1.2, and 1.5 nm for 10-, 20-and 40-shot exposure, respectively.
- High-surface-quality amorphous carbon (a-C) optical coatings with a thickness of 45 nm, deposited by magnetron sputtering on a silicon substrate, were irradiated by the 46.9 nm focused beam of capillary-discharge Ne-like Ar extreme ultraviolet laser. It has been found that an accumulation of 10, 20, and 40 shots at a fluence of 0.5 J/cm(2), i.e., below the single-shot damage threshold, causes irreversible changes of thin a-C layers, which can be registered by both the AFM and the DIC microscopy. In the center of the damaged area, AFM shows a-C removal to a maximum depth of 0.3, 1.2, and 1.5 nm for 10-, 20-and 40-shot exposure, respectively. (en)
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Title
| - Radiation damage to amorphous carbon thin films irradiated by multiple 46.9 nm laser shots below the single-shot damage threshold
- Radiation damage to amorphous carbon thin films irradiated by multiple 46.9 nm laser shots below the single-shot damage threshold (en)
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skos:prefLabel
| - Radiation damage to amorphous carbon thin films irradiated by multiple 46.9 nm laser shots below the single-shot damage threshold
- Radiation damage to amorphous carbon thin films irradiated by multiple 46.9 nm laser shots below the single-shot damage threshold (en)
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skos:notation
| - RIV/68378271:_____/09:00334101!RIV10-MSM-68378271
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(IAA400100701), P(KAN300100702), P(LA08024), P(LC510), P(LC528), Z(AV0Z10100523)
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http://linked.open...iv/cisloPeriodika
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/68378271:_____/09:00334101
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - single-shot damage threshold; multiple-shot exposure damage; amorphous carbon; radiation erosion; capillary-discharge XUV laser (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...odStatuVydavatele
| - US - Spojené státy americké
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http://linked.open...ontrolniKodProRIV
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http://linked.open...i/riv/nazevZdroje
| - Journal of Applied Physics
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...v/svazekPeriodika
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http://linked.open...iv/tvurceVysledku
| - Chalupský, Jaromír
- Hájková, Věra
- Juha, Libor
- Störmer, M.
- Vorlíček, Vladimír
- Reale, A.
- Ritucci, A.
- Zuppella, P.
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http://linked.open...ain/vavai/riv/wos
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http://linked.open...n/vavai/riv/zamer
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issn
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number of pages
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is http://linked.open...avai/riv/vysledek
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