About: Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Low-pressure plasma jet system with two hollow cathodes was used for deposition of BaxSr1-xTiO3 (BSTO) ferroelectric thin films. In the experiment, the composition of BSTO films was controlled by magnitude of average RF power applied on particular plasma jet guns with STO and BTO nozzles. X-ray diffraction proved that BSTO thin films were polycrystalline with perovskite structure and measurement of dielectric properties showed ferroelectric hysteresis loop at room temperature. Low-pressure plasma jet system with two hollow cathodes was used for deposition of BaxSr1-xTiO3 (BSTO) ferroelectric thin films. In the experiment, the composition of BSTO films was controlled by magnitude of average RF power applied on particular plasma jet guns with STO and BTO nozzles. X-ray diffraction proved that BSTO thin films were polycrystalline with perovskite structure and measurement of dielectric properties showed ferroelectric hysteresis loop at room temperature. (en) Nízkotlaký systém dvou plazmových trysek s efektem duté katody byl použit pro depozice feroelektrických tenkých vrstev BaxSr1-xTiO3 (BSTO). Složení BSTO vrstev bylo řízeno velikostí středního vysokofrekvenčního výkonu přiváděného na jednotlivé trysky vyrobené z BTO a STO. Rentgenová difraktometrie potvrdila, že deponované vrstvy BSTO jsou polykrystalické s perovskitovskou strukturou, a měření jejich dielektrických vlastností odhalilo feroelektrickou smyčku při pokojové teplotě. (cs)
Title	Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system (en) Depozice tenkých vrstev BaxSr1-xTiO3 pomocí systému dvou vysokofrekvenčních plazmových trysek s efektem duté katody (cs)
skos:prefLabel	Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system (en) Depozice tenkých vrstev BaxSr1-xTiO3 pomocí systému dvou vysokofrekvenčních plazmových trysek s efektem duté katody (cs)
skos:notation	RIV/68378271:_____/08:00319065!RIV09-AV0-68378271
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(1QS100100563), P(GA202/06/0776), P(KAN101120701), P(KAN301370701), P(KJB100100707), Z(AV0Z10100522), Z(MSM0021620834)
http://linked.open...iv/cisloPeriodika	5-7
http://linked.open...vai/riv/dodaniDat	2009
http://linked.open...aciTvurceVysledku	Čada, Martin Virostko, Petr Hubička, Zdeněk Adámek, Petr Olejníček, Jiří Jastrabík, Lubomír Churpita, Olexandr Deyneka, Alexander
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	362538
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/08:00319065
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	BSTO; ferroelectric films; hollow cathode; Langmuir probe; optical emission spectroscopy; plasma jet (en)
http://linked.open.../riv/klicoveSlovo	Langmuir probe optical emission spectroscopy plasma jet BSTO ferroelectric films hollow cathode
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[E609D13A4AD6]
http://linked.open...i/riv/nazevZdroje	Contributions to Plasma Physics
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	8 (xsd:int)
http://linked.open...cetTvurcuVysledku	10 (xsd:int)
http://linked.open...vavai/riv/projekt	New low temperature plasmatic deposition technologies of Ba1-xSrxTiO3 thin films for tunable microwave applications Nanostructured Macroscopic Systems - Technology and Characterisation Nanocomposite films and nanoparticles prepared in low pressure plasma for surface modifications Advanced research and development of low-temperature plasma sources Low-temperature plasmatic deposition of polycrystalline and nanocrystalline oxide thin films by systems with hollow cathodes
http://linked.open...UplatneniVysledku	2008
http://linked.open...v/svazekPeriodika	48
http://linked.open...iv/tvurceVysledku	Adámek, Petr Jastrabík, Lubomír Olejníček, Jiří Hubička, Zdeněk Čada, Martin Tichý, M. Deyneka, Alexander Virostko, Petr Churpita, Olexander Valvoda, V.
http://linked.open...ain/vavai/riv/wos	000258126900022
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology Condensed Matter Physics – New Materials and Technologies
issn	0863-1042
number of pages	6 (xsd:int)
is http://linked.open...avai/riv/vysledek of	Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system Deposition of BaxSr1-xTiO3 thin films by double RF hollow cathode plasma jet system

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