About: A comparison of plasma in laser and hybrid laser-magnetron SiC deposition systems

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Časově a prostorově rozlišená optická emisní spektroskopie byla využita pro studium plazmatu v depozičních systémech pro přípravu SiC vrstev. Jedná se o systémy s pulsní laserovou depozicí a hybridní s kombinací magnetronového naprašování a pulsní laserové depozice. (cs) Time- and spatially resolved optical emission spectroscopy was performed to characterize the plasma produced in a pulsed laser deposition and a hybrid magnetron sputtering-pulsed laser deposition systems suitable for SiC thin films preparation. Time- and spatially resolved optical emission spectroscopy was performed to characterize the plasma produced in a pulsed laser deposition and a hybrid magnetron sputtering-pulsed laser deposition systems suitable for SiC thin films preparation. (en)
Title	A comparison of plasma in laser and hybrid laser-magnetron SiC deposition systems A comparison of plasma in laser and hybrid laser-magnetron SiC deposition systems (en) Srovnání plazmatu v laserových a hybridních laser-magnetronových systémech pro přípravu SiC (cs)
skos:prefLabel	A comparison of plasma in laser and hybrid laser-magnetron SiC deposition systems A comparison of plasma in laser and hybrid laser-magnetron SiC deposition systems (en) Srovnání plazmatu v laserových a hybridních laser-magnetronových systémech pro přípravu SiC (cs)
skos:notation	RIV/68378271:_____/07:00309732!RIV08-AV0-68378271
http://linked.open.../vavai/riv/strany	S1017;S1021
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA202/06/0216), P(KJB1010417), Z(AV0Z10100522)
http://linked.open...iv/cisloPeriodika	-
http://linked.open...vai/riv/dodaniDat	2008
http://linked.open...aciTvurceVysledku	Lančok, Ján Jelínek, Miroslav Novotný, Michal Bulíř, Jiří
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	407828
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/07:00309732
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	laser ablation; magnetron sputtering; optical emission spectroscopy (en)
http://linked.open.../riv/klicoveSlovo	magnetron sputtering optical emission spectroscopy laser ablation
http://linked.open...odStatuVydavatele	DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV	[977D6ED12330]
http://linked.open...i/riv/nazevZdroje	Plasma Processes and Polymers
http://linked.open...in/vavai/riv/obor	BM
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Nanocrystalline structures in thin optical wavegueides prepared by combination of pulsed laser deposition and magnetron sputtering techniques Study of plasma formed in hybrid arrangement of pulsed laser deposition
http://linked.open...UplatneniVysledku	2007
http://linked.open...v/svazekPeriodika	4
http://linked.open...iv/tvurceVysledku	Jelínek, Miroslav Lančok, Ján Novotný, Michal Bulíř, Jiří
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology
issn	1612-8850
number of pages	5 (xsd:int)
is http://linked.open...avai/riv/vysledek of	A comparison of plasma in laser and hybrid laser-magnetron SiC deposition systems A comparison of plasma in laser and hybrid laser-magnetron SiC deposition systems A comparison of plasma in laser and hybrid laser-magnetron SiC deposition systems

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