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  • By the nitrogen impulse laser generated surface acoustic waves have high frequencies. They penetrate only into subsurface depth. Thus, the LAW method is very proper to study of thin film properties. The elastic constants of films based on amorphous carbon (a-C) like hydrogen free hard carbon, silicon carbide, and also hydrogenated titanium carbide (Ti-C:H) deposited on steel substrates were measured using the LAW method. The basic principles of this method and results obtained are presented, and compared with elastic constants obtained from nanoindentations, as well.
  • By the nitrogen impulse laser generated surface acoustic waves have high frequencies. They penetrate only into subsurface depth. Thus, the LAW method is very proper to study of thin film properties. The elastic constants of films based on amorphous carbon (a-C) like hydrogen free hard carbon, silicon carbide, and also hydrogenated titanium carbide (Ti-C:H) deposited on steel substrates were measured using the LAW method. The basic principles of this method and results obtained are presented, and compared with elastic constants obtained from nanoindentations, as well. (en)
  • Povrchové vlny generované dusíkovým pulzním laserem mají vysoké frekvence a pronikají jen do podpovrchových vrstev. LAW metoda je proto velmi vhodná pro studium vlastností tenkých vrstev.Elastické konstanty filmů na bázi amorfního uhlíku (a-C) jako vodíkuprostý tvrdý uhlík, karbid křemíku a též hydrogenovaný karbid titanu (Ti-C:H) byly zjištěny touto metodou. Jsou prezentovány základní principy této metody a obdržené výsledky byly porovnány s výsledky obdrženými nanoindentací. (cs)
Title
  • Elastic constants of thin films based on amorphous carbon obtained by law method
  • Elastické konstanty tenkých vrstev na bázi amorfního uhlíku získané metodou LAW (laser-acoustic wave) (cs)
  • Elastic constants of thin films based on amorphous carbon obtained by law method (en)
skos:prefLabel
  • Elastic constants of thin films based on amorphous carbon obtained by law method
  • Elastické konstanty tenkých vrstev na bázi amorfního uhlíku získané metodou LAW (laser-acoustic wave) (cs)
  • Elastic constants of thin films based on amorphous carbon obtained by law method (en)
skos:notation
  • RIV/68378271:_____/07:00306238!RIV08-AV0-68378271
http://linked.open.../vavai/riv/strany
  • 705;712
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  • P(1M06002), P(OC 095), P(OC 097), Z(AV0Z10100522)
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  • 419607
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  • RIV/68378271:_____/07:00306238
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  • LAW method; Young's modulus; thin films; amorphous carbon; silicon carbide; titanium carbide (en)
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http://linked.open...ontrolniKodProRIV
  • [84DE9B3E90D7]
http://linked.open...v/mistoKonaniAkce
  • Ljubljana
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  • Ljubljana
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  • Proceedings of the Joint European Conference on Tribology and Final conference on COST 532 action: Triboscience and Tribotechnology
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  • Boháč, Petr
  • Kulykovskyy, Valeriy
  • Picek, Roman
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http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
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  • Slovenian Society for Tribology
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  • 978-961-90254-8-2
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