| Attributes | Values |
|---|
| rdf:type
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| Description
| - Pulzně modulovaný dvoutryskový plazmatický systém s efektem duté katody byl použit pro depozice tenkých vrstev BaxSr1-xTiO3 (BSTO) na Si a multivrstvé Si/SiO2/TiO2/Pt substráty. Obě trysky, vyrobené jedna z keramiky BaTiO3 a druhá z SrTiO3, byly reaktivně odprašovány v modulovaném RF výboji. Pomocí Langmuirovy sondy byly určeny koncentrace elektronů, teplota elektronů a rozdělovací funkce elektronů. Pomocí optické emisní spektroskopie byly určeny teplota neutrálních částic a poměr odprášených atomů (především Ba a Sr). Byla pozorována významná korelace mezi poměrem spektrální intenzity čar Ba a Sr a poměrem atomů Ba a Sr v tenkých vrstvách BSTO. Znalost této korelace byla použita pro depozice gradientních tenkých vrstev BSTO. (cs)
- Pulse modulated double hollow cathode plasma jet system was used for deposition of BaxSr1-xTiO3 (BSTO) thin films on Si and on multi-layer Si/SiO2/TiO2/Pt substrates. Both separate nozzles made of BaTiO3 and SrTiO3 ceramics were reactively sputtered in the RF modulated plasma jet. Electron density, electron temperature and electron energy probability function were determined by Langmuir probe. Temperature of neutral particles and ratio of sputtered atoms (especially Ba and Sr) were estimated by optical emission spectroscopy. High correlation between ratio of spectral intensity of Ba and Sr lines and ratio of Ba and Sr atoms in BSTO thin film was observed. Knowledge of this correlation was used for deposition of compositional gradient BSTO thin films.
- Pulse modulated double hollow cathode plasma jet system was used for deposition of BaxSr1-xTiO3 (BSTO) thin films on Si and on multi-layer Si/SiO2/TiO2/Pt substrates. Both separate nozzles made of BaTiO3 and SrTiO3 ceramics were reactively sputtered in the RF modulated plasma jet. Electron density, electron temperature and electron energy probability function were determined by Langmuir probe. Temperature of neutral particles and ratio of sputtered atoms (especially Ba and Sr) were estimated by optical emission spectroscopy. High correlation between ratio of spectral intensity of Ba and Sr lines and ratio of Ba and Sr atoms in BSTO thin film was observed. Knowledge of this correlation was used for deposition of compositional gradient BSTO thin films. (en)
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| Title
| - Measurements of plasma parameters during BaxSr1-xTiO3 thin films deposition by double hollow cathode plasma jet system
- Measurements of plasma parameters during BaxSr1-xTiO3 thin films deposition by double hollow cathode plasma jet system (en)
- Měření parametrů plazmatu během depozice tenkých vrstev BaxSr1-xTiO3 pomocí dvoutryskového plazmatického systému s efektem duté katody (cs)
|
| skos:prefLabel
| - Measurements of plasma parameters during BaxSr1-xTiO3 thin films deposition by double hollow cathode plasma jet system
- Measurements of plasma parameters during BaxSr1-xTiO3 thin films deposition by double hollow cathode plasma jet system (en)
- Měření parametrů plazmatu během depozice tenkých vrstev BaxSr1-xTiO3 pomocí dvoutryskového plazmatického systému s efektem duté katody (cs)
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| skos:notation
| - RIV/68378271:_____/06:00324065!RIV09-AV0-68378271
|
| http://linked.open...avai/riv/aktivita
| |
| http://linked.open...avai/riv/aktivity
| - Z(AV0Z10100522), Z(MSM0021620834)
|
| http://linked.open...iv/cisloPeriodika
| |
| http://linked.open...vai/riv/dodaniDat
| |
| http://linked.open...aciTvurceVysledku
| |
| http://linked.open.../riv/druhVysledku
| |
| http://linked.open...iv/duvernostUdaju
| |
| http://linked.open...titaPredkladatele
| |
| http://linked.open...dnocenehoVysledku
| |
| http://linked.open...ai/riv/idVysledku
| - RIV/68378271:_____/06:00324065
|
| http://linked.open...riv/jazykVysledku
| |
| http://linked.open.../riv/klicovaSlova
| - BSTO thin films; hollow cathode sputtering; Langmuir probe; emission spectroscopy (en)
|
| http://linked.open.../riv/klicoveSlovo
| |
| http://linked.open...odStatuVydavatele
| |
| http://linked.open...ontrolniKodProRIV
| |
| http://linked.open...i/riv/nazevZdroje
| - Czechoslovak Journal of Physics
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| http://linked.open...in/vavai/riv/obor
| |
| http://linked.open...ichTvurcuVysledku
| |
| http://linked.open...cetTvurcuVysledku
| |
| http://linked.open...UplatneniVysledku
| |
| http://linked.open...v/svazekPeriodika
| |
| http://linked.open...iv/tvurceVysledku
| - Jastrabík, Lubomír
- Olejníček, Jiří
- Hubička, Zdeněk
- Tichý, M.
- Deyneka, Alexander
- Virostko, Petr
- Adámek, P.
- Šícha, M.
- Šíchová, H.
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| http://linked.open...ain/vavai/riv/wos
| |
| http://linked.open...n/vavai/riv/zamer
| |
| issn
| |
| number of pages
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| is http://linked.open...avai/riv/vysledek
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