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Description
  • Jsou prezentovány výsledky analýzy time-of-flight spekter iontů mědi a hliníku generovaných pomocí XeCl eximerového laseru, které jsou po extrakci z plazmatu a následném urychlení implantovány do Si substrátu. Jsou uvedeny hloubkové profily implantovaných iontů. (cs)
  • Extracted Cu and Al ions from UV excimer-laser-produced plasmas were accelerated and implanted into a substrate. Depth profiles of ions in the substrate and analyses of time-of-flight spectra of ions are presented.
  • Extracted Cu and Al ions from UV excimer-laser-produced plasmas were accelerated and implanted into a substrate. Depth profiles of ions in the substrate and analyses of time-of-flight spectra of ions are presented. (en)
Title
  • Pre- and postextraction analyses of different charge state ion components produced in a laser ion source
  • Pre a post extrakční analýzy různých nábojových stavů iontů produkovaných laserovým iontovým zdrojem (cs)
  • Pre- and postextraction analyses of different charge state ion components produced in a laser ion source (en)
skos:prefLabel
  • Pre- and postextraction analyses of different charge state ion components produced in a laser ion source
  • Pre a post extrakční analýzy různých nábojových stavů iontů produkovaných laserovým iontovým zdrojem (cs)
  • Pre- and postextraction analyses of different charge state ion components produced in a laser ion source (en)
skos:notation
  • RIV/68378271:_____/06:00048439!RIV07-AV0-68378271
http://linked.open.../vavai/riv/strany
  • 03B301/1;03B301/3
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(LC528), Z(AV0Z10100523)
http://linked.open...iv/cisloPeriodika
  • 3
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 493903
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/06:00048439
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • laser-produced plasma; time-of-flight ion spectrometry; Cu and Al ions; ion extraction; ion implantation (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [B9F1E347B1A9]
http://linked.open...i/riv/nazevZdroje
  • Review of Scientific Instruments
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 77
http://linked.open...iv/tvurceVysledku
  • Krása, Josef
  • Belloni, F.
  • Nassisi, V.
  • Doria, D.
  • Larusso, A.
http://linked.open...n/vavai/riv/zamer
issn
  • 0034-6748
number of pages
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