About: Short-wavelength ablation of molecular solids: pulse duration and wavelength effects

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Comparing the values of etch rates calculated for nanosecond pulses with those measured for shorter pulses, we can study the influence of pulse duration on XUV ablation efficiency. The results of the experiments also show that the ablation rate increases while the wavelength decreases from the XUV spectral region toward X-rays, mainly due to increase of attenuation lengths at short wavelengths Comparing the values of etch rates calculated for nanosecond pulses with those measured for shorter pulses, we can study the influence of pulse duration on XUV ablation efficiency. The results of the experiments also show that the ablation rate increases while the wavelength decreases from the XUV spectral region toward X-rays, mainly due to increase of attenuation lengths at short wavelengths (en) Když porovnáme vypočtené účinnosti ablace nanosekundovými impulzy s těmi změřenými s femtosekundové impulzy můžeme posoudit vliv délky impulzu na účinnost krátkovlnné ablace. Naše experimentální výsledky dále ukazují, že s poklesem vlnavé délky od XUV do rtg spektrálního oboru ablační účinnost roste s rostoucí atenuační délkou (cs)
Title	Short-wavelength ablation of molecular solids: pulse duration and wavelength effects Krátkovlnná ablace molekulárních pevných látek: vlivy vlnové délky a trvání impulzu (cs) Short-wavelength ablation of molecular solids: pulse duration and wavelength effects (en)
skos:prefLabel	Short-wavelength ablation of molecular solids: pulse duration and wavelength effects Krátkovlnná ablace molekulárních pevných látek: vlivy vlnové délky a trvání impulzu (cs) Short-wavelength ablation of molecular solids: pulse duration and wavelength effects (en)
skos:notation	RIV/68378271:_____/05:00025580!RIV06-AV0-68378271
http://linked.open.../vavai/riv/strany	033007/1;033007/11
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(1P04LA235), P(LN00A100), Z(AV0Z10100523)
http://linked.open...iv/cisloPeriodika	3
http://linked.open...vai/riv/dodaniDat	2006
http://linked.open...aciTvurceVysledku	Otčenášek, Zdeněk Polan, Jiří Rus, Bedřich Stupka, Michal Kozlová, Michaela Juha, Libor Pfeifer, Miroslav Krása, Josef Chvostová, Dagmar Bittner, Michal Präg, Ansgar
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	542558
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/05:00025580
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	ablation; XUV; x-rays; x-ray laser; material processing; microlithography (en)
http://linked.open.../riv/klicoveSlovo	x-rays x-ray laser XUV ablation material processing microlithography
http://linked.open...odStatuVydavatele	US - Spojené státy americké
http://linked.open...ontrolniKodProRIV	[A5D96DD762E0]
http://linked.open...i/riv/nazevZdroje	Journal of Microlithography Microfabrication and Microsystems
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	11 (xsd:int)
http://linked.open...cetTvurcuVysledku	31 (xsd:int)
http://linked.open...vavai/riv/projekt	Research in frame of the International Center for Dense Magnetized Plasma Laser Plasma Research Centre
http://linked.open...UplatneniVysledku	2005
http://linked.open...v/svazekPeriodika	4
http://linked.open...iv/tvurceVysledku	Juha, Libor Krzywinski, J. Kubát, Pavel Kozlová, Michaela Krása, Josef Otčenášek, Zdeněk Polan, Jiří Pína, L. Rocca, J. J. Rus, Bedřich Grisham, M. E. Pelka, J. B. Sobierajski, R. Bittner, Michal Pfeifer, Miroslav Ryc, L. Chvostová, Dagmar Horváth, M. Andrejczuk, A. Bartnik, A. Fiedorowicz, H. Menoni, C. S. Stupka, Michal Rakowski, R. Feldhaus, J. Nietubyc, R. Boody, F. P. Präg R., Ansgar Létal, V. Vaschenko, G. O. Mikolajczyk, J.
http://linked.open...n/vavai/riv/zamer	Intense Radiation Sources and Radiation-Matter Interaction
issn	1537-1646
number of pages	11 (xsd:int)
is http://linked.open...avai/riv/vysledek of	Short-wavelength ablation of molecular solids: pulse duration and wavelength effects

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