About: Bax Sr1-xTiO3 Thin Films Deposited by RF Hollow Cathode Plasma Jet Technique

Facets (new session)
Description
Metadata
Settings
- owl:sameAs
- Inference Rule:

About: Bax Sr1-xTiO3 Thin Films Deposited by RF Hollow Cathode Plasma Jet Technique Goto Sponge NotDistinct Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Článek se zabývá depozicí Bax Sr1-xTiO3 (BST) a SrTiO3 (STO) tenkých vrstev na Si a vícevrstvé Si/SiO2/TiO2/Pt substráty. Tenké vrstvy BSTO a STO byly analyzovány pomocí rentgenové difrakce. Teplota substrátu během depozice byla 500 °C. Rozprašované částice Ba a Sr byly v průběhu depozice kontrolovány pomocí optické emisní spektroskopie. Analýza vrstev pomocí XRD potvrdila přítomnost BSTO a STO ve fázi v perovskitu (cs) The RF modulated plasma jet system was used for the deposition of Bax Sr1-xTiO3 (BST), and SrTiO3 (STO) thin films on Si and multi-layer system Si/SiO2/TiO2/Pt substrates. BSTO and STO thin films were analyzed by X-ray diffraction. During deposition, the substrate was heated at 500 oC . Emission spectroscopy of the plasma was used for control of concentration of sputtered particles from the hollow cathode mainly Sr and Ba atoms. XRD diffraction confirmed presence of BSTO and STO perovskite phase in the films. The RF modulated plasma jet system was used for the deposition of Bax Sr1-xTiO3 (BST), and SrTiO3 (STO) thin films on Si and multi-layer system Si/SiO2/TiO2/Pt substrates. BSTO and STO thin films were analyzed by X-ray diffraction. During deposition, the substrate was heated at 500 oC . Emission spectroscopy of the plasma was used for control of concentration of sputtered particles from the hollow cathode mainly Sr and Ba atoms. XRD diffraction confirmed presence of BSTO and STO perovskite phase in the films. (en)
Title	Bax Sr1-xTiO3 Thin Films Deposited by RF Hollow Cathode Plasma Jet Technique Depozice Bax Sr1-xTiO3 tenkých vrstev pomocí RF výboje v duté katodě (cs) Bax Sr1-xTiO3 Thin Films Deposited by RF Hollow Cathode Plasma Jet Technique (en)
skos:prefLabel	Bax Sr1-xTiO3 Thin Films Deposited by RF Hollow Cathode Plasma Jet Technique Depozice Bax Sr1-xTiO3 tenkých vrstev pomocí RF výboje v duté katodě (cs) Bax Sr1-xTiO3 Thin Films Deposited by RF Hollow Cathode Plasma Jet Technique (en)
skos:notation	RIV/68378271:_____/05:00023637!RIV06-AV0-68378271
http://linked.open.../vavai/riv/strany	1;5
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(KJB1010301), P(KJB1010302), Z(AV0Z10100522), Z(MSM0021620834)
http://linked.open...iv/cisloPeriodika	-
http://linked.open...vai/riv/dodaniDat	2006
http://linked.open...aciTvurceVysledku	Šícha, Miloš Šíchová, Hana Čada, Martin Virostko, Petr Hubička, Zdeněk Olejníček, Jiří Jastrabík, Lubomír Chvostová, Dagmar Deyneka, Alexander
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	513583
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/05:00023637
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	ferroelectric thin films; hollow catode; emission spectroscopy; ellipsometry (en)
http://linked.open.../riv/klicoveSlovo	ellipsometry ferroelectric thin films emission spectroscopy hollow catode
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[FBEBB37B173D]
http://linked.open...i/riv/nazevZdroje	Ferroelectrics
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	9 (xsd:int)
http://linked.open...cetTvurcuVysledku	9 (xsd:int)
http://linked.open...vavai/riv/projekt	Phase transitions and relaxation processes in thin-film ferroelectric Investigation of Multi-Plasma-Jet System as a Source for Low Temperature Deposition of Perovskites Thin Films
http://linked.open...UplatneniVysledku	2005
http://linked.open...v/svazekPeriodika	317
http://linked.open...iv/tvurceVysledku	Jastrabík, Lubomír Olejníček, Jiří Hubička, Zdeněk Čada, Martin Chvostová, Dagmar Deyneka, Alexander Virostko, Petr Šícha, Miloš Šíchová, Hana
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology Condensed Matter Physics – New Materials and Technologies
issn	0015-0193
number of pages	6 (xsd:int)
is http://linked.open...avai/riv/vysledek of	Bax Sr1-xTiO3 Thin Films Deposited by RF Hollow Cathode Plasma Jet Technique

Faceted Search & Find service v1.16.118 as of Jun 21 2024

Alternative Linked Data Documents: ODE Content Formats:

RDF

ODATA

Microdata

About

OpenLink Virtuoso version 07.20.3240 as of Jun 21 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 58 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software