About: Investigation of the RF pulse modulated plasma jet system during the deposition of Pb(ZrxTi1-x)O3 thin films on polymer substrates

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The RF modulated plasma jet system was investigated during the deposition of Pb(ZrxTi1-x)O3 (PZT) thin films on polymer substrates. PZT films were deposited simultaneously on Si and polymer substrates with Pt layer. PZT films were deposited simultaneously on Si and polymer substrates with Pt layer The RF modulated plasma jet system was investigated during the deposition of Pb(ZrxTi1-x)O3 (PZT) thin films on polymer substrates. PZT films were deposited simultaneously on Si and polymer substrates with Pt layer. PZT films were deposited simultaneously on Si and polymer substrates with Pt layer (en) Článek se zabývá studiem tryskového systému při depozici tenkých vrstev Pb(ZrxTi1-x)O3 (PZT) na polymerní substráty. Vrstvy PZT byly deponovány na křemíkový a plymerní substrát s platinovou vrstvou. Ke studiu vývoje parametrů plazmatu uvnitř plazmového kanálu během modulačního cyklu byla použita Langmuirova sonda s RF kompenzací umístěná v pozici substrátu. Analýza deponovaných PZT vrstev ukázala, že jejich stechiometrie je silně závislá na energii iontů dopadajících na substrát. (cs)
Title	Investigation of the RF pulse modulated plasma jet system during the deposition of Pb(ZrxTi1-x)O3 thin films on polymer substrates Studium RF pulzně modulovaného plasma jet systému během depozice tenkých vrstev Pb(ZrxTi1-x)O3 na polymerní substráty (cs) Investigation of the RF pulse modulated plasma jet system during the deposition of Pb(ZrxTi1-x)O3 thin films on polymer substrates (en)
skos:prefLabel	Investigation of the RF pulse modulated plasma jet system during the deposition of Pb(ZrxTi1-x)O3 thin films on polymer substrates Studium RF pulzně modulovaného plasma jet systému během depozice tenkých vrstev Pb(ZrxTi1-x)O3 na polymerní substráty (cs) Investigation of the RF pulse modulated plasma jet system during the deposition of Pb(ZrxTi1-x)O3 thin films on polymer substrates (en)
skos:notation	RIV/68378271:_____/05:00023616!RIV06-AV0-68378271
http://linked.open.../vavai/riv/strany	940;946
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(KJB1010302), Z(AV0Z10100522), Z(MSM 124100004)
http://linked.open...iv/cisloPeriodika	-
http://linked.open...vai/riv/dodaniDat	2006
http://linked.open...aciTvurceVysledku	Čada, Martin Boháč, Petr Virostko, Petr Hubička, Zdeněk Olejníček, Jiří Jastrabík, Lubomír Jurek, Karel Deyneka, Alexander
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Fyzikální ústav AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	525630
http://linked.open...ai/riv/idVysledku	RIV/68378271:_____/05:00023616
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	: PZT thin films; plasma jet; Langmuir probe; plasma impedance (en)
http://linked.open.../riv/klicoveSlovo	Langmuir probe plasma jet : PZT thin films plasma impedance
http://linked.open...odStatuVydavatele	CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV	[A2F7024CC3D4]
http://linked.open...i/riv/nazevZdroje	Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor	BL
http://linked.open...ichTvurcuVysledku	8 (xsd:int)
http://linked.open...cetTvurcuVysledku	12 (xsd:int)
http://linked.open...vavai/riv/projekt	Investigation of Multi-Plasma-Jet System as a Source for Low Temperature Deposition of Perovskites Thin Films
http://linked.open...UplatneniVysledku	2005
http://linked.open...v/svazekPeriodika	200
http://linked.open...iv/tvurceVysledku	Jastrabík, Lubomír Olejníček, Jiří Gerlach, G. Hubička, Zdeněk Suchaneck, G. Boháč, Petr Čada, Martin Jurek, Karel Deyneka, Alexander Virostko, Petr Adámek, P. Guenther, M.
http://linked.open...n/vavai/riv/zamer	Wave and Corpuscular Light Propagation, Optical Materials and Technology http://linked.opendata.cz/resource/domain/vavai/zamer/MSM%20124100004
issn	0257-8972
number of pages	7 (xsd:int)
is http://linked.open...avai/riv/vysledek of	Investigation of the RF pulse modulated plasma jet system during the deposition of Pb(ZrxTi1-x)O3 thin films on polymer substrates

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