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  • Atmospheric barrier-torch discharge was used for low temperature deposition of thin conductive oxide thin films on polymer substrates. An atmospheric high-density plasma jet was excited at the outlet of the quartz nozzle with an external metallic ring electrode. InxOy and SnOx transparent and conductive films were deposited on polymer, quartz and silicon substrates by this technique
  • Atmospheric barrier-torch discharge was used for low temperature deposition of thin conductive oxide thin films on polymer substrates. An atmospheric high-density plasma jet was excited at the outlet of the quartz nozzle with an external metallic ring electrode. InxOy and SnOx transparent and conductive films were deposited on polymer, quartz and silicon substrates by this technique (en)
  • Atmosférický bariérový-pochodňový výboj byl použit pro nízkoteplotní depozici tenkých a vodivých oxidových vrstev na polymerní substráty. Plazmatický kanál s vysokou koncentrací nabitých částic byl vybuzen na výstupu křemenné trysky obalené kovovou elektrodou. Průhledné a vodivé tenké vrstvy InxOy a SnOx byly připraveny na polymerní, křemenné a křemíkové substráty pomocí této technologie (cs)
Title
  • Investigation of the low temperature atmospheric deposition of TCO thin films on polymer substrates
  • Investigation of the low temperature atmospheric deposition of TCO thin films on polymer substrates (en)
  • Studium nízkoteplotního atmosférického zdroje plazmatu pro depozici TCO tenkých vrstev na polymerní substráty (cs)
skos:prefLabel
  • Investigation of the low temperature atmospheric deposition of TCO thin films on polymer substrates
  • Investigation of the low temperature atmospheric deposition of TCO thin films on polymer substrates (en)
  • Studium nízkoteplotního atmosférického zdroje plazmatu pro depozici TCO tenkých vrstev na polymerní substráty (cs)
skos:notation
  • RIV/68378271:_____/04:00100165!RIV/2005/AV0/A02005/N
http://linked.open.../vavai/riv/strany
  • 699;704
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(IBS1010203)
http://linked.open...iv/cisloPeriodika
  • -
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 568926
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/04:00100165
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • atmospheric deposition; TCO thin films; emission spectroscopy (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • CH - Švýcarská konfederace
http://linked.open...ontrolniKodProRIV
  • [522574EC66CD]
http://linked.open...i/riv/nazevZdroje
  • Surface and Coatings Technology
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
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http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 177-178
http://linked.open...iv/tvurceVysledku
  • Jastrabík, Lubomír
  • Hubička, Zdeněk
  • Čada, Martin
  • Churpita, Olexander
  • Šíchová, Hana
issn
  • 0257-8972
number of pages
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