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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type
Description
  • Kombinace fotolitografie, litografie elektronovým svazkem a AFM litografie je použita pro lokální oxidaci povrchů ukončených vodíkem s rozlišením 10 nm (cs)
  • The combination of photolithography, e-beam lithography and atomic force microscopy(AFM) techniques is used for local oxidation of hydrogen terminated surfaces with a resolution down to ~10nm
  • The combination of photolithography, e-beam lithography and atomic force microscopy(AFM) techniques is used for local oxidation of hydrogen terminated surfaces with a resolution down to ~10nm (en)
Title
  • Local oxidation of hydrogenated diamond surfaces for devices fabrication
  • Local oxidation of hydrogenated diamond surfaces for devices fabrication (en)
  • Lokální oxidace hydrogenovaných povrchů diamantů pro výrobu elektronickych prvků (cs)
skos:prefLabel
  • Local oxidation of hydrogenated diamond surfaces for devices fabrication
  • Local oxidation of hydrogenated diamond surfaces for devices fabrication (en)
  • Lokální oxidace hydrogenovaných povrchů diamantů pro výrobu elektronickych prvků (cs)
skos:notation
  • RIV/68378271:_____/02:00100518!RIV/2005/AV0/A02005/N
http://linked.open.../vavai/riv/strany
  • 523;528
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • Z(AV0Z1010914)
http://linked.open...iv/cisloPeriodika
  • 3
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 651990
http://linked.open...ai/riv/idVysledku
  • RIV/68378271:_____/02:00100518
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • photolithography; e-beamlithography; atomic force microscopy (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...odStatuVydavatele
  • DE - Spolková republika Německo
http://linked.open...ontrolniKodProRIV
  • [E72230AE4E20]
http://linked.open...i/riv/nazevZdroje
  • Physica status solidi. A - Applied Research
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...UplatneniVysledku
http://linked.open...v/svazekPeriodika
  • 193
http://linked.open...iv/tvurceVysledku
  • Rezek, Bohuslav
  • Bergonzo, P.
  • Stutzmann, M.
  • Nebel, C. E.
  • Garrido, J. A.
  • Snidero, E.
http://linked.open...n/vavai/riv/zamer
issn
  • 0031-8965
number of pages
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