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  • In order to optimize the shape of the Differentially pumped chamber in the area of the Primary Electron Beam passage for the current concept of the location of the foci of the Primary Electron Beam, it was necessary to adapt to the size and shape of the limitations of the existing structure. On fig. 1a is the total cross sectional view of the Differentially pumped chamber. Three variants were examined: Current concept with an easily machined shape of the passage of the primary beam, semi-closed concept with a conical shape, cone concept with a wider cone.
  • In order to optimize the shape of the Differentially pumped chamber in the area of the Primary Electron Beam passage for the current concept of the location of the foci of the Primary Electron Beam, it was necessary to adapt to the size and shape of the limitations of the existing structure. On fig. 1a is the total cross sectional view of the Differentially pumped chamber. Three variants were examined: Current concept with an easily machined shape of the passage of the primary beam, semi-closed concept with a conical shape, cone concept with a wider cone. (en)
Title
  • Analysis of the gas glow
  • Analysis of the gas glow (en)
skos:prefLabel
  • Analysis of the gas glow
  • Analysis of the gas glow (en)
skos:notation
  • RIV/68081731:_____/14:00434642!RIV15-AV0-68081731
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • I, P(EE.2.3.20.0103)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
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http://linked.open...dnocenehoVysledku
  • 2817
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/14:00434642
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • SEM; ESEM; gas glow; analysis (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [AB455A9BE8BD]
http://linked.open...v/mistoKonaniAkce
  • Mikulov
http://linked.open...i/riv/mistoVydani
  • Brno
http://linked.open...i/riv/nazevZdroje
  • Workshop of Interesting Topics of SEM and ESEM
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Neděla, Vilém
  • Vyroubal, P.
  • Maxa, J.
  • Hladká, K.
  • Hlavatá, P.
  • Vaculík, S.
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
number of pages
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  • Institute of Scientific Instruments AS CR, v. v. i
https://schema.org/isbn
  • 978-80-87441-12-1
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