About: Interferometric system with tracking refractometry capability in the measuring axis

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We present a combined interferometric arrangement designed for measurement of one-axis displacement over a specified measuring range with mechanical referencing. This concept allows simultaneous measurement of the carriage position from both sides together with monitoring of the overall range. This can be used in configuration with in-line monitoring of the fluctuations of the refractive index-tracking refractometry. Similarly, the wavelength of the laser source can be stabilized over the measuring range, effectively compensating for the refractive index changes. Otherwise, monitoring of length of the measuring range can give information about the thermal dilatation effects of frame of the whole measuring setup. This technique can find its way into high-precision positioning systems in nanometrology We present a combined interferometric arrangement designed for measurement of one-axis displacement over a specified measuring range with mechanical referencing. This concept allows simultaneous measurement of the carriage position from both sides together with monitoring of the overall range. This can be used in configuration with in-line monitoring of the fluctuations of the refractive index-tracking refractometry. Similarly, the wavelength of the laser source can be stabilized over the measuring range, effectively compensating for the refractive index changes. Otherwise, monitoring of length of the measuring range can give information about the thermal dilatation effects of frame of the whole measuring setup. This technique can find its way into high-precision positioning systems in nanometrology (en)
Title	Interferometric system with tracking refractometry capability in the measuring axis Interferometric system with tracking refractometry capability in the measuring axis (en)
skos:prefLabel	Interferometric system with tracking refractometry capability in the measuring axis Interferometric system with tracking refractometry capability in the measuring axis (en)
skos:notation	RIV/68081731:_____/13:00399809!RIV14-TA0-68081731
http://linked.open...avai/predkladatel	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...avai/riv/aktivita	I P
http://linked.open...avai/riv/aktivity	I, P(ED0017/01/01), P(GA102/09/1276), P(GPP102/11/P820), P(TA02010711), P(TE01020233)
http://linked.open...iv/cisloPeriodika	6
http://linked.open...vai/riv/dodaniDat	2014
http://linked.open...aciTvurceVysledku	Hrabina, Jan Číp, Ondřej Lazar, Josef Oulehla, Jindřich Holá, Miroslava
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	80739
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/13:00399809
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	refractometry; nanopositioning; interferometry; nanometrology (en)
http://linked.open.../riv/klicoveSlovo	interferometry nanometrology nanopositioning refractometry
http://linked.open...odStatuVydavatele	GB - Spojené království Velké Británie a Severního Irska
http://linked.open...ontrolniKodProRIV	[0F87E92B9AD6]
http://linked.open...i/riv/nazevZdroje	Measurement Science and Technology
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Advanced Microscopy and Spectroscopy Platform for Research and Development in Nano and Microtechnologies - AMISPEC APPLICATION LABORATORIES OF ADVANCED MICROTECHNOLOGIES AND NANOTECHNOLOGIES Interferometer with full in-line compensation of the fluctuations of refractive index Interferometric measurement techniques for nanopositioning Advanced interferometric systems for measurement in nanotechnology
http://linked.open...UplatneniVysledku	2013
http://linked.open...v/svazekPeriodika	24
http://linked.open...iv/tvurceVysledku	Hrabina, Jan Lazar, Josef Číp, Ondřej Oulehla, Jindřich Holá, Miroslava
http://linked.open...ain/vavai/riv/wos	000319267900029
issn	0957-0233
number of pages	6 (xsd:int)
http://bibframe.org/vocab/doi	10.1088/0957-0233/24/6/067001

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