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Description
  • High pressure of gas mostly water vapour, with pressure range from 0.1 Pa to 80 Pa in the first differentially pumped chamber and 10 Pa to over 2000 Pa in the specimen chamber is used in variable pressure scanning electron microscopes (VP-SEM) such as our experimental AQUASEM II equipped with a combined YAG-BSE and ionization detector of SE. The gas environment causes unwanted primary electron beam diffusion, but it also supports gas ionization cascade amplification of the signal of secondary electrons (SE), accelerated by the applied field of detection electrode of the ionisation detector.
  • High pressure of gas mostly water vapour, with pressure range from 0.1 Pa to 80 Pa in the first differentially pumped chamber and 10 Pa to over 2000 Pa in the specimen chamber is used in variable pressure scanning electron microscopes (VP-SEM) such as our experimental AQUASEM II equipped with a combined YAG-BSE and ionization detector of SE. The gas environment causes unwanted primary electron beam diffusion, but it also supports gas ionization cascade amplification of the signal of secondary electrons (SE), accelerated by the applied field of detection electrode of the ionisation detector. (en)
Title
  • Simulation of Energy Selective signal Amplification in Gas Environment of Variable Pressure SEM
  • Simulation of Energy Selective signal Amplification in Gas Environment of Variable Pressure SEM (en)
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  • Simulation of Energy Selective signal Amplification in Gas Environment of Variable Pressure SEM
  • Simulation of Energy Selective signal Amplification in Gas Environment of Variable Pressure SEM (en)
skos:notation
  • RIV/68081731:_____/11:00368930!RIV12-AV0-68081731
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  • P(GAP102/10/1410), Z(AV0Z20650511)
http://linked.open...iv/cisloPeriodika
  • Suppl. 2
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  • 229435
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  • RIV/68081731:_____/11:00368930
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  • variable pressure scanning electron microscopes (VP-SEM); AQUASEM II; simlulation (en)
http://linked.open.../riv/klicoveSlovo
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  • US - Spojené státy americké
http://linked.open...ontrolniKodProRIV
  • [D3B8C23F49BD]
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  • Microscopy and Microanalysis
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  • 17
http://linked.open...iv/tvurceVysledku
  • Konvalina, Ivo
  • Neděla, Vilém
  • Zlámal, J.
  • Lencová, B.
http://linked.open...n/vavai/riv/zamer
issn
  • 1431-9276
number of pages
http://bibframe.org/vocab/doi
  • 10.1017/S1431927611005472
is http://linked.open...avai/riv/vysledek of
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