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  • We present an experimental arrangement of an interferometric system designed to operate with full compensation for varying refractive index of air in the measuring axis. The concept is based on a principle where the wavelength of the laser source is derived not from an optical frequency of the stabilized laser but from a fixed length being a base-plate or a frame of the whole measuring setup. This results into stabilization of the wavelength of the laser source in atmospheric conditions to mechanical length of suitable etalon made of a material with very low thermal expansion. The ultra-low thermal expanding glass ceramic materials available on the market perform thermal expansion coefficients on the level 10-8 which significantly exceeds the limits of uncertainty posed by indirect evaluation of refractive index of air through Edlen formula. This approach represents a contribution primarily to high-resolution and high-precision dimensional metrology in the nanoscale.
  • We present an experimental arrangement of an interferometric system designed to operate with full compensation for varying refractive index of air in the measuring axis. The concept is based on a principle where the wavelength of the laser source is derived not from an optical frequency of the stabilized laser but from a fixed length being a base-plate or a frame of the whole measuring setup. This results into stabilization of the wavelength of the laser source in atmospheric conditions to mechanical length of suitable etalon made of a material with very low thermal expansion. The ultra-low thermal expanding glass ceramic materials available on the market perform thermal expansion coefficients on the level 10-8 which significantly exceeds the limits of uncertainty posed by indirect evaluation of refractive index of air through Edlen formula. This approach represents a contribution primarily to high-resolution and high-precision dimensional metrology in the nanoscale. (en)
Title
  • Standing Wave Interferometer with Stabilization of Wavelength on Air
  • Standing Wave Interferometer with Stabilization of Wavelength on Air (en)
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  • Standing Wave Interferometer with Stabilization of Wavelength on Air
  • Standing Wave Interferometer with Stabilization of Wavelength on Air (en)
skos:notation
  • RIV/68081731:_____/11:00368388!RIV12-MSM-68081731
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  • P(GA102/09/1276), P(GPP102/11/P820), P(KAN311610701), P(LC06007), Z(AV0Z20650511)
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  • 11
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  • 231950
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  • RIV/68081731:_____/11:00368388
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  • refractometry; nanopositioning; interferometry; nanometrology (en)
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  • DE - Spolková republika Německo
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  • [C10D604CEFD8]
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  • tm-Technisches Messen
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  • 78
http://linked.open...iv/tvurceVysledku
  • Buchta, Zdeněk
  • Hrabina, Jan
  • Lazar, Josef
  • Číp, Ondřej
  • Čížek, Martin
http://linked.open...ain/vavai/riv/wos
  • 000297711400002
http://linked.open...n/vavai/riv/zamer
issn
  • 0171-8096
number of pages
http://bibframe.org/vocab/doi
  • 10.1524/teme.2011.0201
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