About: Mapping of dopants in silicon by injection of electrons     Goto   Sponge   NotDistinct   Permalink

An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

AttributesValues
rdf:type
Description
  • Scanning electron microscope belongs to viable tools for mapping the density of dopants in semiconductors. For probing the silicon structures usually the electron beam is used at energies around 1 keV because of high contrasts between differently doped areas. However, also the very low landing energy range has proven itself an efficient tool for mapping the dopants. We have focused on p-type structures of various dopant densities. Imaging by means of secondary electrons (SE) and its quantifiability has been verified and the method was extended to very low energies where dynamical changes in the contrast have been observed.
  • Scanning electron microscope belongs to viable tools for mapping the density of dopants in semiconductors. For probing the silicon structures usually the electron beam is used at energies around 1 keV because of high contrasts between differently doped areas. However, also the very low landing energy range has proven itself an efficient tool for mapping the dopants. We have focused on p-type structures of various dopant densities. Imaging by means of secondary electrons (SE) and its quantifiability has been verified and the method was extended to very low energies where dynamical changes in the contrast have been observed. (en)
Title
  • Mapping of dopants in silicon by injection of electrons
  • Mapping of dopants in silicon by injection of electrons (en)
skos:prefLabel
  • Mapping of dopants in silicon by injection of electrons
  • Mapping of dopants in silicon by injection of electrons (en)
skos:notation
  • RIV/68081731:_____/11:00367280!RIV12-AV0-68081731
http://linked.open...avai/predkladatel
http://linked.open...avai/riv/aktivita
http://linked.open...avai/riv/aktivity
  • P(GAP108/11/2270), P(IAA100650902), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat
http://linked.open...aciTvurceVysledku
http://linked.open.../riv/druhVysledku
http://linked.open...iv/duvernostUdaju
http://linked.open...titaPredkladatele
http://linked.open...dnocenehoVysledku
  • 210628
http://linked.open...ai/riv/idVysledku
  • RIV/68081731:_____/11:00367280
http://linked.open...riv/jazykVysledku
http://linked.open.../riv/klicovaSlova
  • dopant; silicon; scanning electron microscopy (en)
http://linked.open.../riv/klicoveSlovo
http://linked.open...ontrolniKodProRIV
  • [CD407E97DCE6]
http://linked.open...v/mistoKonaniAkce
  • Kiel
http://linked.open...i/riv/mistoVydani
  • Kiel
http://linked.open...i/riv/nazevZdroje
  • MC 2011 - Microscopy Conference Kiel
http://linked.open...in/vavai/riv/obor
http://linked.open...ichTvurcuVysledku
http://linked.open...cetTvurcuVysledku
http://linked.open...vavai/riv/projekt
http://linked.open...UplatneniVysledku
http://linked.open...iv/tvurceVysledku
  • Konvalina, Ivo
  • Mikulík, P.
  • Hovorka, Miloš
  • Frank, Luděk
http://linked.open...vavai/riv/typAkce
http://linked.open.../riv/zahajeniAkce
http://linked.open...n/vavai/riv/zamer
number of pages
http://purl.org/ne...btex#hasPublisher
  • DGE
https://schema.org/isbn
  • 978-3-00-033910-3
is http://linked.open...avai/riv/vysledek of
Faceted Search & Find service v1.16.116 as of Feb 22 2024


Alternative Linked Data Documents: ODE     Content Formats:   [cxml] [csv]     RDF   [text] [turtle] [ld+json] [rdf+json] [rdf+xml]     ODATA   [atom+xml] [odata+json]     Microdata   [microdata+json] [html]    About   
This material is Open Knowledge   W3C Semantic Web Technology [RDF Data] Valid XHTML + RDFa
OpenLink Virtuoso version 07.20.3239 as of Feb 22 2024, on Linux (x86_64-pc-linux-gnu), Single-Server Edition (126 GB total memory, 67 GB memory in use)
Data on this page belongs to its respective rights holders.
Virtuoso Faceted Browser Copyright © 2009-2024 OpenLink Software