About: Properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The cathode lens is an electron optical element in an emission electron microscope accelerating electrons from the sample, which serves as a source for a beam of electrons. Special application consists in using the cathode lens first for retardation of an illuminating electron beam and then for acceleration of reflected as well as secondary electrons, made in the directly imaging low energy electron microscope or in its scanning version discussed here. In order to form a real image, the cathode lens has to be combined with a focusing magnetic lens or a focusing immersion-magnetic lens, as used for objective lenses of some commercial scanning electron microscopes. These two alternatives are compared with regards to their optical properties, in particular with respect to predicted aberration coefficients and the spot size, as well as the optimum angular aperture of the primary beam. The important role of the final aperture size on the image resolution is also presented. The cathode lens is an electron optical element in an emission electron microscope accelerating electrons from the sample, which serves as a source for a beam of electrons. Special application consists in using the cathode lens first for retardation of an illuminating electron beam and then for acceleration of reflected as well as secondary electrons, made in the directly imaging low energy electron microscope or in its scanning version discussed here. In order to form a real image, the cathode lens has to be combined with a focusing magnetic lens or a focusing immersion-magnetic lens, as used for objective lenses of some commercial scanning electron microscopes. These two alternatives are compared with regards to their optical properties, in particular with respect to predicted aberration coefficients and the spot size, as well as the optimum angular aperture of the primary beam. The important role of the final aperture size on the image resolution is also presented. (en)
Title	Properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens Properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens (en)
skos:prefLabel	Properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens Properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens (en)
skos:notation	RIV/68081731:_____/11:00358594!RIV12-MSM-68081731
http://linked.open...avai/predkladatel	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(ED0017/01/01), P(GAP102/10/1410), P(IAA100650902), Z(AV0Z20650511)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Müllerová, Ilona Konvalina, Ivo
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	224691
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/11:00358594
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	cathode lens; compound objective lens; aberration coefficients; spot size; field calculations (en)
http://linked.open.../riv/klicoveSlovo	aberration coefficients cathode lens spot size compound objective lens field calculations
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[C416D7B5AC48]
http://linked.open...i/riv/nazevZdroje	Nuclear Instruments & Methods in Physics Research Section A
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...vavai/riv/projekt	Scanning transmission electron microscopy with very slow electrons APPLICATION LABORATORIES OF ADVANCED MICROTECHNOLOGIES AND NANOTECHNOLOGIES The study of the influence of magnetic and electric fields for amplification of secondary electron signals detected by a novel detector in VP-SEM.
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	645
http://linked.open...iv/tvurceVysledku	Konvalina, Ivo Müllerová, Ilona
http://linked.open...ain/vavai/riv/wos	000292713900012
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
issn	0168-9002
number of pages	5 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.nima.2010.12.232
is http://linked.open...avai/riv/vysledek of	Properties of the cathode lens combined with a focusing magnetic/immersion-magnetic lens

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