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  • This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models.
  • This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models. (en)
Title
  • Comparison of calculated, simulated and measured signal amplification in variable pressure SEM
  • Comparison of calculated, simulated and measured signal amplification in variable pressure SEM (en)
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  • Comparison of calculated, simulated and measured signal amplification in variable pressure SEM
  • Comparison of calculated, simulated and measured signal amplification in variable pressure SEM (en)
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  • RIV/68081731:_____/11:00358591!RIV12-AV0-68081731
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  • P(FR-TI1/118), P(FR-TI1/305), P(GAP102/10/1410), S, Z(AV0Z20650511)
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  • 1
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  • 191073
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  • RIV/68081731:_____/11:00358591
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  • electron-gas interactions; Monte Carlo simulations; signal amplification; analytical models (en)
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  • NL - Nizozemsko
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  • [BA6BA56C321C]
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  • Nuclear Instruments & Methods in Physics Research Section A
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  • 645
http://linked.open...iv/tvurceVysledku
  • Konvalina, Ivo
  • Lencová, Bohumila
  • Neděla, Vilém
  • Zlámal, J.
http://linked.open...ain/vavai/riv/wos
  • 000292713900016
http://linked.open...n/vavai/riv/zamer
issn
  • 0168-9002
number of pages
http://bibframe.org/vocab/doi
  • 10.1016/j.nima.2010.12.200
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