About: Correction of sample tilt in FIB instruments

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Many particle optical instruments use ion beams focused onto a tilted sample and the rotationally symmetrical beam creates an elliptical spot. Furthermore, an additional electrostatic field may be present near the titled sample, an extracting field of a detector or a spectrometer or a retarding field on the sample, for example. As a result, the dipole and quadrupole components of the field near the axis of the column cause an additional astigmatic focusing of the beam, which leads to even more elongated shape of the spot. A method of determining a correction has been developed, which allows to compensate for both the ellipticity due to the tilt and the additional astigmatism and to achieve a circular spot on the titled sample. The compensation is provided by a suitable setting of two correcting quadruples and by refocusing the objective lens. The required settings of the quadrupole excitations and objective lens are obtained by a paraxial optimization. Many particle optical instruments use ion beams focused onto a tilted sample and the rotationally symmetrical beam creates an elliptical spot. Furthermore, an additional electrostatic field may be present near the titled sample, an extracting field of a detector or a spectrometer or a retarding field on the sample, for example. As a result, the dipole and quadrupole components of the field near the axis of the column cause an additional astigmatic focusing of the beam, which leads to even more elongated shape of the spot. A method of determining a correction has been developed, which allows to compensate for both the ellipticity due to the tilt and the additional astigmatism and to achieve a circular spot on the titled sample. The compensation is provided by a suitable setting of two correcting quadruples and by refocusing the objective lens. The required settings of the quadrupole excitations and objective lens are obtained by a paraxial optimization. (en)
Title	Correction of sample tilt in FIB instruments Correction of sample tilt in FIB instruments (en)
skos:prefLabel	Correction of sample tilt in FIB instruments Correction of sample tilt in FIB instruments (en)
skos:notation	RIV/68081731:_____/11:00358590!RIV12-AV0-68081731
http://linked.open...avai/predkladatel	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(IAA100650805), Z(AV0Z20650511)
http://linked.open...iv/cisloPeriodika	1
http://linked.open...vai/riv/dodaniDat	2012
http://linked.open...aciTvurceVysledku	Oral, Martin Lencová, Bohumila
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	192046
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/11:00358590
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	sample tilt; extraction field; correction of elliptical beam shape; calculation of intensity distribution; focused ion beams (en)
http://linked.open.../riv/klicoveSlovo	calculation of intensity distribution correction of elliptical beam shape extraction field focused ion beams sample tilt
http://linked.open...odStatuVydavatele	NL - Nizozemsko
http://linked.open...ontrolniKodProRIV	[8200244297D4]
http://linked.open...i/riv/nazevZdroje	Nuclear Instruments & Methods in Physics Research Section A
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	2 (xsd:int)
http://linked.open...cetTvurcuVysledku	2 (xsd:int)
http://linked.open...vavai/riv/projekt	Misalignment aberrations in electron optical systems
http://linked.open...UplatneniVysledku	2011
http://linked.open...v/svazekPeriodika	645
http://linked.open...iv/tvurceVysledku	Lencová, Bohumila Oral, Martin
http://linked.open...ain/vavai/riv/wos	000292713900025
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
issn	0168-9002
number of pages	6 (xsd:int)
http://bibframe.org/vocab/doi	10.1016/j.nima.2010.12.003
is http://linked.open...avai/riv/vysledek of	Correction of sample tilt in FIB instruments Correction of sample tilt in FIB instruments

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