About: Modification of the Schottky FE ZrO/W electron emitter

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	A Schottky electron emitter with a layer of ZrOx is used in our e-beam writing system working with a rectangular-shaped electron beam. The low radius of the tip less than 300 nm is necessary for the proper function of the electron-optical system based on the principle of point projection. A Schottky electron emitter with a layer of ZrOx is used in our e-beam writing system working with a rectangular-shaped electron beam. The low radius of the tip less than 300 nm is necessary for the proper function of the electron-optical system based on the principle of point projection. (en)
Title	Modification of the Schottky FE ZrO/W electron emitter Modification of the Schottky FE ZrO/W electron emitter (en)
skos:prefLabel	Modification of the Schottky FE ZrO/W electron emitter Modification of the Schottky FE ZrO/W electron emitter (en)
skos:notation	RIV/68081731:_____/10:00352423!RIV11-MSM-68081731
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(ED0017/01/01), P(FR-TI1/576), P(IAA100650803), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Horáček, Miroslav Kolařík, Vladimír Matějka, František Král, Stanislav
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	272234
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/10:00352423
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	e-beam writing system; rectangular-shaped electron beam; point projection (en)
http://linked.open.../riv/klicoveSlovo	e-beam writing system point projection rectangular-shaped electron beam
http://linked.open...ontrolniKodProRIV	[30C995A44B3A]
http://linked.open...v/mistoKonaniAkce	Rio de Janeiro
http://linked.open...i/riv/mistoVydani	Rio de Janeiro
http://linked.open...i/riv/nazevZdroje	Proceedings of the 17th IFSM International Microscopy Congress
http://linked.open...in/vavai/riv/obor	JA
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Optimization of electron-beam production technology APPLICATION LABORATORIES OF ADVANCED MICROTECHNOLOGIES AND NANOTECHNOLOGIES Coherent imaging of nanostructures in a low-energy scanning electron microscope with an area detector of electrons
http://linked.open...UplatneniVysledku	2010
http://linked.open...iv/tvurceVysledku	Horáček, Miroslav Kolařík, Vladimír Matějka, František Král, Stanislav
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2010-09-19 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Sociedade Brasileira de Microscopia e Microanilise
https://schema.org/isbn	978-85-63273-06-2
is http://linked.open...avai/riv/vysledek of	Modification of the Schottky FE ZrO/W electron emitter Modification of the Schottky FE ZrO/W electron emitter Modification of the Schottky FE ZrO/W electron emitter

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