About: Interferometer controlled positioning for nanometrology

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	We present a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The interferometric setup not only improves resolution of the position control but also ensures direct traceability to the primary etalon of length. The system was developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology. The interferometers are supplied from a frequency doubled Nd:YAG laser stabilized by linear absorption spectroscopy in molecular iodine and the interferometric configuration controls the stage position in all six degrees of freedom. We present a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The interferometric setup not only improves resolution of the position control but also ensures direct traceability to the primary etalon of length. The system was developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology. The interferometers are supplied from a frequency doubled Nd:YAG laser stabilized by linear absorption spectroscopy in molecular iodine and the interferometric configuration controls the stage position in all six degrees of freedom. (en)
Title	Interferometer controlled positioning for nanometrology Interferometer controlled positioning for nanometrology (en)
skos:prefLabel	Interferometer controlled positioning for nanometrology Interferometer controlled positioning for nanometrology (en)
skos:notation	RIV/68081731:_____/10:00352199!RIV11-GA0-68081731
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(GA102/09/1276), P(KAN311610701), P(LC06007), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Čížek, Martin Hrabina, Jan Číp, Ondřej Lazar, Josef Šerý, Mojmír
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	264486
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/10:00352199
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	nanometrology; interferometry; local probe microscopy; nanopositioning (en)
http://linked.open.../riv/klicoveSlovo	local probe microscopy interferometry nanometrology nanopositioning
http://linked.open...ontrolniKodProRIV	[493A48BD474A]
http://linked.open...v/mistoKonaniAkce	Olomouc
http://linked.open...i/riv/mistoVydani	Ostrava
http://linked.open...i/riv/nazevZdroje	2nd International Conference NANOCON 2010
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Nanometrology using methods of scanning probe microscopy Centre of Modern Optics Interferometer with full in-line compensation of the fluctuations of refractive index
http://linked.open...UplatneniVysledku	2010
http://linked.open...iv/tvurceVysledku	Hrabina, Jan Klapetek, P. Lazar, Josef Číp, Ondřej Čížek, Martin Šerý, Mojmír
http://linked.open...vavai/riv/typAkce	EUR - Evropská
http://linked.open...ain/vavai/riv/wos	000286656400049
http://linked.open.../riv/zahajeniAkce	2010-10-12 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
number of pages	5 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Tanger s.r.o.
https://schema.org/isbn	978-80-87294-19-2
is http://linked.open...avai/riv/vysledek of	Interferometer controlled positioning for nanometrology

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