About: Laser Measuring Gauge for Precise Transducer Calibrations in Nanometric Scale

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

Attributes	Values
rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	The precise transducers like capacitive, inductive or incremental sensors for distance measurements are used in nanometrology applications very often. They measure 3D position of a cantilever in AFM microscopy stage, they sense thickness of nano-layers or they help us to identify thermal dilatation of nanomaterials. Their main advantages are: lower price than laser interferometers, smaller dimensions and possibility to insert them into very complicated measuring setup. Before installing these sensors for various nanotechnology applications it is necessary to calibrate their scale by high-resolution laser interferometer. Such an interferometer is implemented into special measuring gauge where the investigated sensor is inserted and calibrated. In the work we present new laser measuring system for precise calibrations of length measuring transducers. This gauge is called nano-comparator because the resolution of the positioning of its measuring probe is in order of nanometers. The precise transducers like capacitive, inductive or incremental sensors for distance measurements are used in nanometrology applications very often. They measure 3D position of a cantilever in AFM microscopy stage, they sense thickness of nano-layers or they help us to identify thermal dilatation of nanomaterials. Their main advantages are: lower price than laser interferometers, smaller dimensions and possibility to insert them into very complicated measuring setup. Before installing these sensors for various nanotechnology applications it is necessary to calibrate their scale by high-resolution laser interferometer. Such an interferometer is implemented into special measuring gauge where the investigated sensor is inserted and calibrated. In the work we present new laser measuring system for precise calibrations of length measuring transducers. This gauge is called nano-comparator because the resolution of the positioning of its measuring probe is in order of nanometers. (en)
Title	Laser Measuring Gauge for Precise Transducer Calibrations in Nanometric Scale Laser Measuring Gauge for Precise Transducer Calibrations in Nanometric Scale (en)
skos:prefLabel	Laser Measuring Gauge for Precise Transducer Calibrations in Nanometric Scale Laser Measuring Gauge for Precise Transducer Calibrations in Nanometric Scale (en)
skos:notation	RIV/68081731:_____/10:00352197!RIV11-GA0-68081731
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(FR-TI1/241), P(GA102/09/1276), P(GAP102/10/1813), P(KAN311610701), P(LC06007), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Buchta, Zdeněk Čížek, Martin Hrabina, Jan Číp, Ondřej Lazar, Josef Mikel, Břetislav
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	267943
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/10:00352197
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	nanometrology; sensors; distance measurements; measuring gauge (en)
http://linked.open.../riv/klicoveSlovo	sensors nanometrology distance measurements measuring gauge
http://linked.open...ontrolniKodProRIV	[4D3F77964121]
http://linked.open...v/mistoKonaniAkce	Ottawa
http://linked.open...i/riv/mistoVydani	Ottawa
http://linked.open...i/riv/nazevZdroje	Proceedings of the International Conference on Nanotechnology: Fundamentals and Applications
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	6 (xsd:int)
http://linked.open...cetTvurcuVysledku	6 (xsd:int)
http://linked.open...vavai/riv/projekt	Components for nano-diagnostic of length fluctuations, deviation of shapes and surface faults Methods for generation of a length etalon by means of stabilized femtosecond mode-locked laser Nanometrology using methods of scanning probe microscopy Centre of Modern Optics Interferometer with full in-line compensation of the fluctuations of refractive index
http://linked.open...UplatneniVysledku	2010
http://linked.open...iv/tvurceVysledku	Buchta, Zdeněk Hrabina, Jan Lazar, Josef Číp, Ondřej Čížek, Martin Mikel, Břetislav
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2010-08-04 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
number of pages	5 (xsd:int)
http://purl.org/ne...btex#hasPublisher	International ASET
https://schema.org/isbn	978-0-9867183-0-4
is http://linked.open...avai/riv/vysledek of	Laser Measuring Gauge for Precise Transducer Calibrations in Nanometric Scale

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