About: Laser interferometric measuring system for positioning in nanometrology

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An Entity of Type : http://linked.opendata.cz/ontology/domain/vavai/Vysledek, within Data Space : linked.opendata.cz associated with source document(s)

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	In this contribution we present a development of a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The key goal for introduction of interferometer measurement is not only improvement of resolution but the direct traceability to the primary etalon of length. Interferometry compared to a host of other optical length measuring techniques [1,2,3...] represents the most precise measuring technique available. The system is being developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology. In this contribution we present a development of a system for dimensional nanometrology based on scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of sample profile combined with interferometer controlled positioning. The key goal for introduction of interferometer measurement is not only improvement of resolution but the direct traceability to the primary etalon of length. Interferometry compared to a host of other optical length measuring techniques [1,2,3...] represents the most precise measuring technique available. The system is being developed to operate at and in cooperation with the Czech metrology institute for calibration purposes and nanometrology. (en)
Title	Laser interferometric measuring system for positioning in nanometrology Laser interferometric measuring system for positioning in nanometrology (en)
skos:prefLabel	Laser interferometric measuring system for positioning in nanometrology Laser interferometric measuring system for positioning in nanometrology (en)
skos:notation	RIV/68081731:_____/10:00351325!RIV11-GA0-68081731
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(FR-TI1/241), P(GA102/09/1276), P(KAN311610701), P(LC06007), Z(AV0Z20650511)
http://linked.open...iv/cisloPeriodika	10
http://linked.open...vai/riv/dodaniDat	2011
http://linked.open...aciTvurceVysledku	Čížek, Martin Hrabina, Jan Číp, Ondřej Lazar, Josef Šerý, Mojmír
http://linked.open.../riv/druhVysledku	J - Článek v odborném periodiku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	267940
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/10:00351325
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	Interferometry; local probe microscopy; nanometrology; nanopositioning; traceability (en)
http://linked.open.../riv/klicoveSlovo	local probe microscopy traceability nanometrology nanopositioning Interferometry
http://linked.open...odStatuVydavatele	GR - Řecká republika
http://linked.open...ontrolniKodProRIV	[1A20FB61DB1B]
http://linked.open...i/riv/nazevZdroje	WSEAS Transactions on Circuits and Systems
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	Components for nano-diagnostic of length fluctuations, deviation of shapes and surface faults Nanometrology using methods of scanning probe microscopy Centre of Modern Optics Interferometer with full in-line compensation of the fluctuations of refractive index
http://linked.open...UplatneniVysledku	2010
http://linked.open...v/svazekPeriodika	9
http://linked.open...iv/tvurceVysledku	Hrabina, Jan Lazar, Josef Číp, Ondřej Čížek, Martin Šerý, Mojmír
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
issn	1109-2734
number of pages	10 (xsd:int)
is http://linked.open...avai/riv/vysledek of	Laser interferometric measuring system for positioning in nanometrology

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