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rdf:type
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Description
| - Presented paper describes a novel portable interferometric nanocomparator for calibraring displacement sensors in precision industry. Digital quadrature detector with high resolution based on a digital signal controller is used for processing the X-Y signals from the detection unit of the interferometer. Digital filtering increases signal to noise ratio and results in sub-nanometer resolution and accuracy of the laser interferometer. High dynamic range of the measuring mirror displacement is achieved using a two stage positioning system formed of a linear guide way and piezoelectric actuators.
- Presented paper describes a novel portable interferometric nanocomparator for calibraring displacement sensors in precision industry. Digital quadrature detector with high resolution based on a digital signal controller is used for processing the X-Y signals from the detection unit of the interferometer. Digital filtering increases signal to noise ratio and results in sub-nanometer resolution and accuracy of the laser interferometer. High dynamic range of the measuring mirror displacement is achieved using a two stage positioning system formed of a linear guide way and piezoelectric actuators. (en)
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Title
| - Interferometric Nanoscale Comparator
- Interferometric Nanoscale Comparator (en)
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skos:prefLabel
| - Interferometric Nanoscale Comparator
- Interferometric Nanoscale Comparator (en)
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skos:notation
| - RIV/68081731:_____/09:00335249!RIV10-MSM-68081731
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http://linked.open...avai/riv/aktivita
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http://linked.open...avai/riv/aktivity
| - P(2A-1TP1/127), P(2A-3TP1/113), P(2C06012), P(FT-TA3/133), P(GA102/07/1179), P(GA102/09/1276), P(GP102/09/P630), P(KAN311610701), P(LC06007), Z(AV0Z20650511)
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http://linked.open...vai/riv/dodaniDat
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http://linked.open...aciTvurceVysledku
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http://linked.open.../riv/druhVysledku
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http://linked.open...iv/duvernostUdaju
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http://linked.open...titaPredkladatele
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http://linked.open...dnocenehoVysledku
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http://linked.open...ai/riv/idVysledku
| - RIV/68081731:_____/09:00335249
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http://linked.open...riv/jazykVysledku
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http://linked.open.../riv/klicovaSlova
| - interferometric nanocomparator; laser interferometer (en)
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http://linked.open.../riv/klicoveSlovo
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http://linked.open...ontrolniKodProRIV
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http://linked.open...v/mistoKonaniAkce
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http://linked.open...i/riv/mistoVydani
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http://linked.open...i/riv/nazevZdroje
| - MOC'09 - 15th Microoptics Conference
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http://linked.open...in/vavai/riv/obor
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http://linked.open...ichTvurcuVysledku
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http://linked.open...cetTvurcuVysledku
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http://linked.open...vavai/riv/projekt
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http://linked.open...UplatneniVysledku
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http://linked.open...iv/tvurceVysledku
| - Hrabina, Jan
- Lazar, Josef
- Číp, Ondřej
- Čížek, Martin
- Šmíd, Radek
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http://linked.open...vavai/riv/typAkce
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http://linked.open.../riv/zahajeniAkce
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http://linked.open...n/vavai/riv/zamer
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number of pages
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http://purl.org/ne...btex#hasPublisher
| - Microoptics Group (OSJ/JSAP)
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https://schema.org/isbn
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is http://linked.open...avai/riv/vysledek
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