About: Novel instrumentation for interferometric nanoscale comparator

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Presented paper deals with the description of subsystems of a novel interferometric nanocomparator. High speed digital quadrature detector based on digital signal controller is used here for processing of the X-Y signals from the detection unit of the interferometer. Digital filtering increases signal to noise ratio and allows achievement of sub-nanometer resolution and accuracy of the laser interferometer. The refractive index of the air is computed continuously from the current atmospheric values using Edlen's formula. High dynamic range of the mirror displacement setting is achieved using a two stage positioning system formed of a linear guide way and piezoelectric actuators. The linear guide way is used for open-loop coarse positioning with 50 nm accuracy and up to 100 mm of displacement. Piezoelectric actuators in servo-loop linked to the interferometer value are used for fine positioning with better than 1 nm accuracy over a 5 μm range. Presented paper deals with the description of subsystems of a novel interferometric nanocomparator. High speed digital quadrature detector based on digital signal controller is used here for processing of the X-Y signals from the detection unit of the interferometer. Digital filtering increases signal to noise ratio and allows achievement of sub-nanometer resolution and accuracy of the laser interferometer. The refractive index of the air is computed continuously from the current atmospheric values using Edlen's formula. High dynamic range of the mirror displacement setting is achieved using a two stage positioning system formed of a linear guide way and piezoelectric actuators. The linear guide way is used for open-loop coarse positioning with 50 nm accuracy and up to 100 mm of displacement. Piezoelectric actuators in servo-loop linked to the interferometer value are used for fine positioning with better than 1 nm accuracy over a 5 μm range. (en)
Title	Novel instrumentation for interferometric nanoscale comparator Novel instrumentation for interferometric nanoscale comparator (en)
skos:prefLabel	Novel instrumentation for interferometric nanoscale comparator Novel instrumentation for interferometric nanoscale comparator (en)
skos:notation	RIV/68081731:_____/09:00335088!RIV10-MSM-68081731
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(2A-1TP1/127), P(2A-3TP1/113), P(2C06012), P(FT-TA3/133), P(GA102/07/1179), P(GA102/09/1276), P(GP102/09/P630), P(KAN311610701), P(LC06007), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat	2010
http://linked.open...aciTvurceVysledku	Buchta, Zdeněk Čížek, Martin Číp, Ondřej Lazar, Josef Mikel, Břetislav
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	330044
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/09:00335088
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	high resolution interferometry; laser comparator; precision displacement sensors (en)
http://linked.open.../riv/klicoveSlovo	laser comparator precision displacement sensors high resolution interferometry
http://linked.open...ontrolniKodProRIV	[2263C2E9241B]
http://linked.open...v/mistoKonaniAkce	Munich
http://linked.open...i/riv/mistoVydani	Bellingham
http://linked.open...i/riv/nazevZdroje	Optical Measurement Systems for Industrial Inspection VI. (Proceedings of SPIE Vol. 7389)
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	5 (xsd:int)
http://linked.open...cetTvurcuVysledku	5 (xsd:int)
http://linked.open...vavai/riv/projekt	High resolution multiwavelegth absolute laser interferometry Nanometrology using methods of scanning probe microscopy Centre of Modern Optics The research of methods of diagnostics of gauge blocks for precicion engineering *Investigetion of dynamics of the laser welding process and its control Safe optical wireless links for municipal networks System of laser interferometers for nanometrology of lenghts. Methods for determination of the refractive index of air with optical resonators Interferometer with full in-line compensation of the fluctuations of refractive index
http://linked.open...UplatneniVysledku	2009
http://linked.open...iv/tvurceVysledku	Buchta, Zdeněk Lazar, Josef Číp, Ondřej Čížek, Martin Mikel, Břetislav
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2009-06-14 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
number of pages	7 (xsd:int)
http://purl.org/ne...btex#hasPublisher	SPIE
https://schema.org/isbn	978-0-8194-7672-2
is http://linked.open...avai/riv/vysledek of	Novel instrumentation for interferometric nanoscale comparator Novel instrumentation for interferometric nanoscale comparator Novel instrumentation for interferometric nanoscale comparator Novel instrumentation for interferometric nanoscale comparator

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