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Description
  • A Monte Carlo simulation program for the modeling of image formation in scanning electron microscopy is presented. A key feature of the program is its modular design, so the different aspects of image formation (i.e. forming of the electron probe, specimen topography model, probe-sample-interaction, electron detector model, image processing) are arranged in separate program modules. The program is written in C++ and uses object-oriented programming techniques. Data exchange between the different program modules is performed by defined software interfaces. Thus, third party simulation code can easily be integrated into the program.
  • A Monte Carlo simulation program for the modeling of image formation in scanning electron microscopy is presented. A key feature of the program is its modular design, so the different aspects of image formation (i.e. forming of the electron probe, specimen topography model, probe-sample-interaction, electron detector model, image processing) are arranged in separate program modules. The program is written in C++ and uses object-oriented programming techniques. Data exchange between the different program modules is performed by defined software interfaces. Thus, third party simulation code can easily be integrated into the program. (en)
Title
  • Modular Monte Carlo Simulation Including Secondary Electron Raytracing
  • Modular Monte Carlo Simulation Including Secondary Electron Raytracing (en)
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  • Modular Monte Carlo Simulation Including Secondary Electron Raytracing
  • Modular Monte Carlo Simulation Including Secondary Electron Raytracing (en)
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  • RIV/68081731:_____/08:00335886!RIV10-AV0-68081731
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  • Z(AV0Z20650511)
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  • 380264
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  • RIV/68081731:_____/08:00335886
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  • Monte Carlo simulation; SEM (en)
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  • [F71BBA51AF5D]
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  • Skalský dvůr
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  • Brno
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  • Proceedings of the 11th International Seminar on Recent Trends in Charged Particle Optics and Surface Physics Instrumentation
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  • Konvalina, Ivo
  • Müllerová, Ilona
  • Bosse, H.
  • Frase, C. G.
  • Gnieser, D.
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number of pages
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  • Institute of Scientific Instruments AS CR, v.v.i
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  • 978-80-254-0905-3
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