About: Interferometric displacement measurement for local probe microscopy

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rdf:type	skos:Concept http://linked.opendata.cz/ontology/domain/vavai/Vysledek
Description	Prezentujeme uspořádání pro polohování a interferometrické měření vzorku pro různé druhy mikroskopů s lokální sondou. Polohování významně rozšiřuje rozsah mikroskopů s lokální sondou, kde polohovací stolek nabízí nanometrové rozlišení ve všech třech osách v režimu zpětnovazební regulace s detekcí polohy kapacitními snímači. Interferometrický systém sledující polohu stolku ve všech šesti stupních volnosti zajišťuje plnou metrologickou návaznost na základní etalon délky a zlepšuje rozlišení a přesnost měření polohy. (cs) We present an arrangement for positioning and interferometric measurement of a sample for various types of local probe microscopes. The positioning extends significantly the field of view of the local probe microscopy where the stage allows motion with nanometer resolution in all three axes under a closed loop control with position detection via capacitive sensors. Interferometric system monitoring all six degrees of freedom of the stage ensures full metrological traceability of the positioning to the fundamental etalon of length and improves resolution and overall precision of the displacement monitoring. We present an arrangement for positioning and interferometric measurement of a sample for various types of local probe microscopes. The positioning extends significantly the field of view of the local probe microscopy where the stage allows motion with nanometer resolution in all three axes under a closed loop control with position detection via capacitive sensors. Interferometric system monitoring all six degrees of freedom of the stage ensures full metrological traceability of the positioning to the fundamental etalon of length and improves resolution and overall precision of the displacement monitoring. (en)
Title	Interferometric displacement measurement for local probe microscopy Interferometrické měření polohy pro mikroskopii s lokální sondou (cs) Interferometric displacement measurement for local probe microscopy (en)
skos:prefLabel	Interferometric displacement measurement for local probe microscopy Interferometrické měření polohy pro mikroskopii s lokální sondou (cs) Interferometric displacement measurement for local probe microscopy (en)
skos:notation	RIV/68081731:_____/08:00316634!RIV09-AV0-68081731
http://linked.open...avai/riv/aktivita	P Z
http://linked.open...avai/riv/aktivity	P(2A-1TP1/127), P(2A-3TP1/113), P(2C06012), P(FT-TA3/133), P(GA102/07/1179), P(IAA200650504), P(LC06007), Z(AV0Z20650511)
http://linked.open...vai/riv/dodaniDat	2009
http://linked.open...aciTvurceVysledku	Čížek, Martin Číp, Ondřej Lazar, Josef Šerý, Mojmír
http://linked.open.../riv/druhVysledku	D - Článek ve sborníku
http://linked.open...iv/duvernostUdaju	S - Úplné a pravdivé údaje nepodléhající ochraně podle zvláštních právních předpisů
http://linked.open...titaPredkladatele	Ústav přístrojové techniky AV ČR, v. v. i.
http://linked.open...dnocenehoVysledku	372910
http://linked.open...ai/riv/idVysledku	RIV/68081731:_____/08:00316634
http://linked.open...riv/jazykVysledku	eng - angličtina
http://linked.open.../riv/klicovaSlova	interferometry; local probe microscopy; nanometrology (en)
http://linked.open.../riv/klicoveSlovo	local probe microscopy interferometry nanometrology
http://linked.open...ontrolniKodProRIV	[AB7B4DBC8739]
http://linked.open...v/mistoKonaniAkce	Ilmenau
http://linked.open...i/riv/mistoVydani	llmenau
http://linked.open...i/riv/nazevZdroje	ICPM 2008 - International Conference on Precision Measurement
http://linked.open...in/vavai/riv/obor	BH
http://linked.open...ichTvurcuVysledku	4 (xsd:int)
http://linked.open...cetTvurcuVysledku	4 (xsd:int)
http://linked.open...vavai/riv/projekt	Centre of Modern Optics The research of methods of diagnostics of gauge blocks for precicion engineering *Investigetion of dynamics of the laser welding process and its control Safe optical wireless links for municipal networks System of laser interferometers for nanometrology of lenghts. Methods for determination of the refractive index of air with optical resonators Precision of the optical frequency of lasers stabilized on saturated absorption in iodine
http://linked.open...UplatneniVysledku	2008
http://linked.open...iv/tvurceVysledku	Lazar, Josef Číp, Ondřej Čížek, Martin Šerý, Mojmír
http://linked.open...vavai/riv/typAkce	WRD - Světová
http://linked.open.../riv/zahajeniAkce	2008-09-08 (xsd:date)
http://linked.open...n/vavai/riv/zamer	Research into experimental methods for examination of the physical properties of matter and their application in advanced technologies
number of pages	2 (xsd:int)
http://purl.org/ne...btex#hasPublisher	Technische Universität llmenau
https://schema.org/isbn	978-3-938843-38-3
is http://linked.open...avai/riv/vysledek of	Interferometric displacement measurement for local probe microscopy Interferometric displacement measurement for local probe microscopy

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